基于共光路漂移量检测与同步补偿的激光自准直原理与方法研究

This research aims at the problem that it is hard to balance high-resolution, low-drift in addition with high anti-disturbance property at the same time in autocollimation based micro-angle measurement. The main contents of this research are listed as follows. (1)To establish theoretical models of autocollimation based on geometrical ray-tracing method and physical optics method respectively; To analyze the generation roots of drift and its function mechanism in autocollimation using the models; To explore approaches to decrease the drift from its generation roots; To provide theoretical basis for analysis, design and optimizition of systematic parameters of autocollimation; (2)To research the common-path based drift detection method and principle in autocollimation; To establish beam transmission model to provide theoretical basis for accurate drift detection in autocollimation; (3)To research synchronized compensation method based on real-time direction-correction technology for the drift in autocollimation; To establish beam drift compensation model to analyze impact factors of compensation accuracy; To provide theoretical guide for improving compensation accuracy; (4)To develop laser autocollimation principle prototype based on common-path drift detection and synchronized compensation for micro-angle measurement, the angle resolution will be superior to 5nrad, drift will be lower than 50nrad/2h. By finishing this project, a high-resolution and low-drift property balanced laser autocollimation based micro-angle measurement method and technology with independent intellectual property; This project can be widely applied to angle unit tracing research, micro-nano manufacture and detection and scientific research and so on.

针对自准直法超精密微角度测量普遍存在的高分辨力、低漂移及高干扰性难以兼顾的问题，本课题研究内容为：(1)基于几何光线追迹法和物理光学法分别建立自准直理论模型，分析自准直中漂移量的产生根源及其作用机理，探索从根源上减小漂移的途径，并为自准直系统参数的分析、设计与优化提供理论基础；(2)研究自准直中共光路漂移量检测方法与原理，建立自准直光束方向传输变换模型，为自准直中漂移量的精确检测提供理论基础；(3)研究基于光束方向实时校正技术的漂移量同步补偿方法，建立光束漂移补偿模型，分析补偿精度的影响因素，为提高补偿精度提供理论指导；(4)研制基于共光路漂移量检测与同步补偿的激光自准直微角度测量原理样机，角度分辨力优于5nrad，漂移量小于50nrad/2h。该项目的完成，可形成具有自主知识产权的高分辨力、低漂移激光自准直微角度测量方法与技术，可广泛应用于角度量溯源、微纳制造与检测及科学研究等领域。

本课题针对激光自准直超精密微小角度测量中普遍存在的高分辨力、低漂移及高抗干扰性难以兼顾的问题，研究一种基于共光路漂移量检测与同步补偿的激光自准直原理与方法。其主要研究内容及成果如下：.(1) 建立了基于光线追迹的自准直几何光学模型。基于光线追迹推导了物面坐标点经过自准直系统后映射到像面坐标点的数学模型，完整描述了自准直系统中各项参数之间的变化关系，为激光自准直微角度测量中漂移量的抑制和补偿提供理论基础。仿真结果表明，当物点横向离焦量为±5mm、物面与像面轴向离焦量为±2mm时，在±2000″范围内对测量结果的影响量分别为0.7170″和4.3540″；激光光源的角漂移量在±10″内对测量结果的影响量为0.0182″。仿真结果为从根源上减小激光自准直中的漂移量提供了理论依据。相关成果发表国际会议论文1篇。.(2) 提出了基于共光路光束漂移测量与同步补偿的激光自准直方法。该方法中利用所设计的组合靶标或平面镜参考靶标，在自准直过程中产生一束参考光束，参考光束对被测角度不敏感、并且与测量光束共光路传输，从而利用参考光束能够精确获取自准直过程中测量光束的角漂移量，进而对该角漂移量进行同步补偿，提高激光自准直微小角度测量的稳定性。实验结果表明，基于组合靶标和基于平面镜参考靶标的激光自准直方法中，所得到的参考光束与测量光束的角漂移量一致性可以分别达到80%和90%以上。.(3) 研制了基于共光路漂移量检测与同步补偿的激光自准直微角度测量原理样机，对其主要性能参数进行测试。实验结果表明，该激光自准直装置的有效分辨力达到0.0003″，2小时稳定性最高可以达到0.0026″，在高的有效分辨力下实现了低漂移、高测量稳定性。相关成果发表SCI论文3篇，EI论文1篇，申请中国发明专利5项。.(4) 共发表论文5篇，其中SCI 3篇；EI 1篇，国际会议论文1篇，申请中国发明专利5项，授权国际发明专利2项。