光电探测器三维周期性结构调控及光电管理特性研究

Semiconductor photodetectors hold a great prospect for both military and civil fields, which induces the increasing demand for high speed, high sensitivity and integrated photodetector. The project is going to combine three-dimensional nano-lithography technology with the nano-scale light management methods, aiming on the fabrication of highly efficient integrated photodetectors. Mathematic simulation, materials preparation and device development will be considered comprehensively to study the structure regulation on the three-dimensional periodical nanopatterns and the optoelectronic performances for photodetectors. The nanoimprinting technology will be applied to prepare the geometry and morphology controllable three-dimensional semiconductor film. The light transport, photonic resonant modes and the surface/interface states among the three-dimensional structures will be investigated as well as their effect on the optoelectronic performances for photodetectors. The plasmonic modes will be coupled on the three-dimensional structures, exploring the energy transportation mechanisms and its contribution on the optoelectronic performances. The study of structured film and the coupling plasmonic modes to modify energy transfer process is expected to accelerate the steps on obtaining highly efficient integrated photodetectors. The proposed design of patterned films, experimetal methods, optoelectronic management and expected achievements in this project will provide an alternative route for the research of other kinds of optoelectronic devices.

半导体光电探测器在军事和民用领域均有巨大的发展空间，对其高速、高灵敏度以及可集成化的需求也日益增加。本申请以高效可集成化的光电探测器为研究目标，将三维周期性图形加工技术与纳米尺度下的光电管理方法结合，拟从数值模拟，材料制备以及器件研制三个方面开展光电探测器三维周期性纳米图形结构调控及其光电特性研究。开发纳米压印技术在构建大面积尺寸、形貌可控的三维结构半导体薄膜中的应用，深入理解三维几何效应、光电子传输，以及表界面态对光电性能的影响；结合表面等离激元结构，与三维结构耦合，揭示金属等离子结构在光电探测器工作过程中的能量传输机制；综合深入理解多维结构下光电传输机制，获得可集成化的高性能光电探测器。本项目提出的三维纳米图形化结构的设计、制备工艺经验、纳米光电调控手段以及取得的研究成果，也将为其他光电器件的开发提供新思路。

本项目以高效光电探测器为研究目标，将三维周期性图形加工技术与纳米尺度下的光电管理方法结合，从数值模拟，材料制备以及器件研制三个方面开展了光电探测器三维周期性纳米图形结构调控及其光电特性研究。将纳米压印技术同半导体纳米材料制备技术相结合，直接获得了几何形貌与尺寸可控调节的三维纳米结构大面积半导体薄膜材料；通过理论模拟研究了不同三维尺寸结构下的光电传输机制，优选出了高效光电探测性能的三维光学结构，并实现了器件制造；将表面等离激元结构与三维周期性纳米光学图形的陷光结构相结合，进一步实现了光吸收、光电转换效率以及光电传输性能的最大优化；将三维结构薄膜应用于CMOS器件窗口层材料，明显可增加其透过性和成像分辨率；同时，将本项目提出的三维纳米图形化结构的设计、制备工艺经验、纳米光电调控手段应用在光伏领域，发现利用三维光学结构薄膜作为光伏减反膜，光伏日发电量可提高5%；将大面积半导体薄膜作为柔性光伏基底，柔性电池可进行10000次弯折几乎无效率衰减。本项目获得的一系列结果，将为其他光电器件的开发提供新思路。