碳纳米结构复合增韧非晶碳膜的结构设计及真空摩擦性能研究

The development of space equipment shows urgent demands for the super-lubricating films with ultralow friction coefficient, high toughness as well as super long wear life. Based on the toughened effect of carbon nano structure for amorphous carbon film, the present project aims to research and develop nano carbon structure toughened amorphous carbon film with low friction, high toughness and long wear life in vacuum environment through modern muti-functional vacuum deposition devices as well as closed magnetron sputtering filed technology. Firstly, the type of carbon nanostructure, plasma induced effect and sputtering parameters will be employed to realize the controllable preparation of carbon nanostructure in amorphous carbon film. Then, the effect of the type, quantity, size and arrangement of the nanostructure on the mechanical properties and tribological properties of the carbon films will be study. The relationships between the film structure and film properties will be further revealed. The lubricating and failure mechanism of as-prepared film will be established. Then, the effect of nanostructure on carbon film’s toughness and wear life will be explained. At last, the design principle and the control methods of preparation technology will be put forward. This research will improve the level of understanding of the nature of the structure and performance of amorphous carbon films, and has important theoretical value and guiding significance to promote the practical application of amorphous carbon films in space fields.

针对国家空间技术装备对低摩擦、高强韧、长寿命固体润滑薄膜材料的迫切需求，本项目以碳纳米结构复合增韧非晶碳膜为设计思路，采用现代多功能真空沉积设备，结合封闭场磁控溅射技术，研究和发展在真空环境中具有低摩擦、高强韧、长寿命的非晶碳复合薄膜材料。通过碳纳米结构选择、等离子诱导、沉积参数控制、结构优化等手段，解决非晶碳膜中不同碳纳米结构的可控制备；系统研究碳纳米结构种类、尺寸、含量以及排列方式对薄膜机械及摩擦学性能的影响，阐明碳纳米有序结构与薄膜性能的作用相关性，建立复合薄膜材料在高真空环境中的润滑与失效机制，揭示碳纳米结构对非晶碳膜的增韧、延寿机制，提出发展适用于真空环境下高性能碳基薄膜的设计原则和制备工艺控制方法。本项目的实施，将为发展高可靠性真空环境下关键摩擦副零部件表面防护涂层提供科学基础和技术支撑。

在高真空环境中具有较低摩擦系数的非晶碳基薄膜在航空航天和装备制造领域显示了巨大的应用前景。本项目利用封闭场磁控溅射技术，实现溅射靶面不同碳纳米结构的调控，并将纳米结构复合增韧的设计思想引入到复合薄膜制备方法中。通过不同碳纳米结构的筛选、靶材种类选择、沉积参数调控，实现了非晶碳膜中有序结构的可控生长。对比研究了碳纳米结构对薄膜机械及摩擦学性能的影响。基于此研究内容，本项目制备出了具有高硬度、高弹性恢复、在大气和高真空中均具有低摩擦磨损性能的复合薄膜材料；所开发的薄膜硬度＞10GPa；弹性恢复＞85%；大气摩擦系数＜0.05；真空环境中的摩擦系数＜0.02；薄膜的磨损寿命依据GJB3032-97测试标准＞10^6转。本研究揭示了碳基薄膜的相关构-效关系，建立了复合薄膜在高真空环境下的摩擦磨损机理，明晰了相关延寿机制。提出了适用于高真空环境下高性能碳基薄膜的设计原则和制备工艺控制方法。本研究的实施不仅丰富了真空摩擦学理论，而且为发展适用于高真空环境下的强韧耐磨碳基薄膜的结构设计与制备技术提供设计思路和技术支撑。