集成一体化多功能传感器的研究

The future direction of sensor development is integrative, intelligentized, miniaturized, multi-funtional. Because working principles and fabrication technique of the four kind of sensors, including gas sensor, humidity sensor, photosensitive sensor, temperature senor, are similar, this project integrate these sensors on the same ceramic chip. Therefore, the project achieves the goal of integrating the four kinds of sensors. The integrated sensor can be used to detect and monitor the variety of the concentratioin of NOx or NH3, the variety of temperature , ranged from 10℃ to 100℃, the variety of humidity, ranged from 10 to 100% RH , the visible light. At the same time, it is convenient to make a temperature compensation for the other sensors because of the integrated temperature sensor. It is significative to solve the difficulties of making integrated multi-functional sensor, and accelerate the development of intelligentized multi-functional sensors.

本项目采用新型纳米氧化物及复合氧化物敏感材料和有机高分子敏感材料相结合的途径，按准平面器件结构及工艺，设计和研制一种具有统一电阻式工作原理的集温度、湿度、气体和光传感器为一体的新型多功能传感器。这一研究对于突破目前制备一体化多功能传感器的技术难点，研究开发新型多功能传感器和促进智能化多功能传感器的发展具有重要意义。