柔性氧化锌基透明导电薄膜的光、电、力学性能调控

Resource-rich, low-cost, environment-friendly ZnO based flexible transparent conductive film has excellent optical performance, which represents the development trend of flexible transparent conductive films. Until now, the studies on flexible ZnO based films are rather limited and moreover, the photoelectric performance, mechanical properties, and stability of currently studied flexible ZnO films are quite poor. .Starting from aspects of the target preparation, element doping, film design, pretreatment of substrate, and seeded buffer layer control, the purpose of this project is (1) to prepare high quality low-cost transparent conductive ZnO thin films using the DC magnetron sputtering method; (2) to prepare high density ZnO ceramic target with uniform microstructure using liquid and spray granulation technique, (3) to study the effects of different substrates on the microstructure and photoelectric properties, (4) to modulate the photoelectric properties by doping the ZnO with rare earth and/or high-valent elements; (5) to obtain the intrinsic relationships among the microstructure, conduction mechanism, and photoelectric properties; (6) to design new type dielectric/metal/dielectric multilayer structure to improve the optical performance and stability of the film; (7) to improve the flexing performance and the adhesion between films and flexible substrates by pretreatment of flexible substrates using plasma and the deposition of seeded buffer layer on the surface of flexible substrates; and (8) to provide basic data and theoretical guidance for the application of flexible zinc oxide based film industry.

柔性氧化锌基透明导电薄膜因其具有资源丰富、成本低廉、绿色环保等特性，成为柔性透明导电薄膜的发展趋势，目前仅有较少柔性ZnO基薄膜的研究报道，且存在光电性能不高、力学性能差和稳定性低等关键问题，阻碍了柔性ZnO基薄膜的实用化进程。本项目拟从导电靶材制备、多元素掺杂、复合膜系设计、衬底表面改性等方面出发，采用直流磁控溅射方法制备高质量、低成本柔性ZnO基透明导电薄膜。利用液相法和喷雾造粒技术，制备高致密度、微结构均匀的ZnO陶瓷靶材；研究不同衬底对薄膜结构、性能的影响；通过稀土元素和高价位差元素掺杂，调控薄膜的光电性能，获得"微观结构-导电机制-光电性能"的本征关系；设计新型电介质/金属/电介质多层膜结构，提高薄膜的光电性能和稳定性；采用等离子体预处理和沉积籽晶缓冲层等手段，提高薄膜与柔性衬底之间的附着力。本项目能够为柔性氧化锌基薄膜的产业化应用提供基础数据和理论指导。

柔性透明导电薄膜是柔性光电器件的关键组件，氧化锌基柔性透明导电薄膜因其资源丰富、成本低廉、绿色环保等特性成为了柔性透明导电薄膜的发展趋势。本项目从导电靶材制备、多元素掺杂、复合膜系设计、衬底表面改性等方面出发，采用磁控溅射方法制备高质量、低成本柔性ZnO基透明导电薄膜。利用液相法和喷雾造粒技术，制备高致密度、微结构均匀的ZnO陶瓷靶材；研究不同衬底对薄膜结构、性能的影响；通过稀土元素和高价位差元素掺杂，调控薄膜的光电性能，获得“微观结构-导电机制-光电性能”的本征关系；设计新型电介质/金属/电介质多层膜结构，提高薄膜的光电性能和稳定性；采用等离子体预处理和沉积籽晶缓冲层等手段，提高薄膜与柔性衬底之间的附着力。本项目在基础研究的同时进行了产业化开发，已制备出了幅宽400mm、可见光透过率85%以上、薄膜方块电阻20Ω/sq的大面积柔性氧化锌基透明导电薄膜。本项目生产的柔性氧化锌基透明导电薄膜已用于开发柔性太阳能电池及柔性电致变色等柔性光电器件，对推动柔性透明导电薄膜的发展和应用有重要意义。