硬质刀具涂层的连续/脉冲型双激光化学气相沉积机理研究

TiAlCN hard coating may enhance the hardness, wear resistance and corrosion resistance of metallic substrate, and then increase the machining accuracy and working life of the cutting tool, mould and motor gear been served at high speed rotation. In this project, a novel dual-laser chemical vapor deposition (DLCVD) technique is constructed by simultanouesly introducing a high-power super-Gaussian distributed moderate-wavelength continuous laser and a high-energy short-wavelength picosecond pulsed laser into conventional CVD. The TiAlCN coatings with single-phase, controllable preferred orientation and microstructure are prepared at high speeds on the metal substrates at low temperature. The key points of this project are to clarify the effects of two kinds of lasers’ output power, wavelength and pulse width on the decomposition of precursor gas; to study the improvement mechanism of wear resistance with respect to deposition rate, phase structure, microstructure, preferred orientation of TiAlCN coatings. This project is not only able to overcome the urgently technical and scientific issues in the field of hard coatings, but also to develop a novel DLCVD technique and a corresponded theory for the fabrication of other inorganic films and coatings.

TiAlCN等硬质涂层能增加金属工件的表面硬度、耐磨性及抗腐蚀性，从而有效提高高速旋转条件下服役的刀具、模具及汽车零部件的精密度和使用寿命。本项目将大功率超高斯分布中波长连续激光和高能量短波长皮秒脉冲激光同时引入传统的化学气相沉积系统中，建立一种非传统的连续/脉冲型双激光化学气相沉积（DLCVD）技术，在金属基底上低温•高速制备择优取向及微观形貌可控的TiAlCN涂层。重点揭示DLCVD中不同功率、波长、频率和脉宽的激光照射对原料气体分子的分解促进机理；研究涂层的沉积速率、物相组成、微观结构、择优取向及结晶性对提高其耐磨性能的作用机理。项目的实施不仅能解决制备硬质涂层的科学技术问题，而且可应用于其他无机材料薄膜与涂层的制备技术与相应的理论基础。

TiAlCN等硬质涂层能增加金属工件的表面硬度、耐磨性及抗腐蚀性，从而有效提高高速旋.转条件下服役的刀具、模具及汽车零部件的精密度和使用寿命。本项目将大功率超高斯分布中.波长连续激光和高能量短波长皮秒脉冲激光同时引入传统的化学气相沉积系统中，建立一种非.传统的连续/脉冲型双激光化学气相沉积（DLCVD）技术，在金属基底上低温•高速制备择优取.向及微观形貌可控的TiAlCN涂层。重点揭示DLCVD中不同功率、波长、频率和脉宽的激光照射.对原料气体分子的分解促进机理；研究涂层的沉积速率、物相组成、微观结构、择优取向及结.晶性对提高其耐磨性能的作用机理。项目的实施不仅能解决制备硬质涂层的科学技术问题，而.且可应用于其他无机材料薄膜与涂层的制备技术与相应的理论基础。