电诱导微结构制造用高介电常数聚合物薄膜制备及其性能研究

The polymer marterials with high dielectric constant are widely used in microstructure forming, microelectronic device and IC fabrication. The polymer composites with high dielelctric constant prepared by compounding technique have defects of high viscous resistance、low fluidity and low dielectric strength.In this project, the hyperbranched conjugated macromolecules are synthesized by introducing the aromatic and polar molecules in the molecular structure, and then the pure polymer films with high dielectric constant are prepared by the interaction among the hyperbranched conjugate macromolecules. The molecular structrue and morphology of hyperbranched macromolecules and polymer films are characterized.The dielectric properties of the polymer films are investigated and the dependence of dielectric property on the molecular structure, frequency and temperature are establihed. Based on the dielectric theory,the molecular structural mechanism of the polymers with high dielectric constant is explained. The rheological behavior under electrical field of the polymer films is investigated, and the effect of the dielectric property on the rheological behavior is revealed. The electrically induced microstructuring of the films using unpatterned template are tested, and the pattern size and forming process are observed to provide the experimental evidenced for their use in electrically induced microstructure forming(EIMF).

高介电常数聚合物材料广泛应用于微结构制造、微电子器件、集成电路制造等领域。通过复合技术制备的高介电常数聚合物复合材料具有高粘滞阻力、低流动性、低击穿强度等缺陷。该项目拟通过在分子结构中引入适量芳香族极性分子合成超支化共轭大分子，然后用所合成的大分子通过分子间反应制备具有高介电常数的纯聚合物薄膜；分析表征超支化大分子及聚合物薄膜的分子结构及形态。研究该聚合物薄膜的介电性能，建立其介电性能与聚合物结构、电场频率、温度之间的关系；依据聚合物介电理论，分析阐述该聚合物薄膜具有高介电常数的分子结构机理；研究该聚合物薄膜在外电场作用下的流变性能，揭示其介电性能对流变行为的影响规律。采用该聚合物薄膜尝试平面模板电诱导微结构实验，观测微结构形成过程及图形尺度，为其用于电诱导微结构制造提供实验依据。

针对聚合物电诱导微结构制造需要高介电常数、低粘滞阻力聚合物薄膜，项目通过合成共轭超支化大分子并使其与二胺小分子发生分子间反应、以及合成共轭聚合物并使其与极性含芳香基团树脂发生分子间作用制备了两类高介电常数聚合物胶液及其薄膜；分析表征了超支化大分子、共轭聚合物及聚合物薄膜的分子结构/形态，研究了两类聚合物胶液及其薄膜的介电性能/流变性能/表面性能等，建立了高介电常数聚合物薄膜介电性能与其结构、电场频率等的关系；分析阐述了聚合物薄膜具有高介电常数的结构机理；分析阐述了聚合物介电性能/流变行为影响规律。采用该两类聚合物薄膜尝试了其平面模板及结构模板电诱导微结构实验，观测微结构形成过程及图形尺度，建立了该类聚合物电诱导理论模型；实验发现通过电诱导成型，该高介电常数聚合物薄膜可获得理想微结构，为其用于电诱导微结构制造提供了实验及理论依据。