高效MIM电子源的制备及电子注入激发紫外辐射机理研究

UV light source is greatly involved in the environmental, energy source, fabrication, luminance, medical, and biology science, because of its tremendous characteristics in florescence, biology, photochemistry and photo-electronics. Nevertheless, low efficiency is still an open question in mercury free UV light source, restricting the development of the UV light source technology. Therefore, improving the efficiency of the UV light source is the key scientific problem. The fundamental research to improve UV emission efficiency by injecting electrons into gas with high efficient Metal-Insulator-Metal Field Emission source based on Al2O3 Film is proposed. There are two purposes of this project. Firstly, in order to obtain the principle of non-fluctuation electron emission, the influence of the preparation process of the alumina film and the device structure on the electron emission characteristics of the MIM electron source were studied. Secondly, in order to obtain the mechanism of direct excitation of gas by MIM electron source, the relationship between electron emission and gas ignition voltage or ionization voltage were studied. The project on promoting development of low-cost and high-efficiency ultraviolet light source with high efficiency, free fluctuation and large emission current density novel electron emitter, and application of electron source in the field of gas atmosphere, has important scientific significance and application value.

紫外光源可应用于环保、能源、加工照明、医疗、生物和国防等领域，但无汞紫外辐射源输出效率低，制约了紫外辐射源的发展和广泛应用。因此，研究新的紫外辐射机理、发光材料和器件，获得高效率的紫外辐射技术，是当前紫外光源研究首要解决的科学问题。本项目对基于氧化铝薄膜的高效MIM电子源制备及电子注入激发紫外辐射机理进行基础研究。通过研究氧化铝薄膜制备工艺以及器件结构对MIM电子源电子发射特性的影响规律，获得无涨落高效率MIM电子源电子发射的原理；通过探索不同压强气氛环境下激发气体的情况、发射电子对气体着火电压和维持电离电压的影响，获得MIM电子源直接激发气体发光的机理。从而获得能在气氛环境中发射电子的高效率、无涨落、大发射电流密度的新型场发射器件，实现电子对气体的直接激发。此项目的研究成果可用于开发高效、低成本、应用范围更为广泛的紫外光源，并将真空纳电子器件拓展到气氛领域，具有重要的科学意义和实用价值。

紫外光源可应用于环保、能源、加工照明、医疗、生物和国防等领域，但无汞紫外辐射源输出效率低，制约了紫外辐射源的发展和广泛应用。因此，研究新的紫外辐射机理、发光材料和器件，获得高效率的紫外辐射技术，是当前紫外光源研究首要解决的科学问题。本项目对基于氧化铝薄膜的高效MIM电子源制备及电子注入激发紫外辐射机理进行基础研究。（1）研究了制备工艺对壁垒型和多孔型氧化铝薄膜的影响，获得了氧化铝薄膜表面形貌、表面化学组分和孔径及孔分布对电子发射特性的影响规律。（2）研究了负阻效应的形成机理，提出BOAF是导致器件出现负阻效应的主要原因。通过氧化工艺参数调控BAOF和PAOF的厚度，有效抑制器件的负阻效应，获得无涨落高效率MIM电子源电子发射的原理；（3）通过探索不同压强气氛环境下激发气体的情况、获得MIM电子源直接激发气体发光的机理，实现了氖和氙气的气体激发。此项目的研究成果可用于开发高效、低成本、应用范围更为广泛的紫外光源，并将真空纳电子器件拓展到气氛领域，具有重要的科学意义。