饮用水水质在线监测多参数集成微传感器研究

In this project, the key technologies of multi-parameter integrated microsensor will be researched for online distributed drinking water quality monitoring. The sensing materials, sensing mechanism and fabrication techniques of pH, ORP, nitrate, temperature and electrical conductivity will be studied. Multi-parameter integrated microsensor based on MEMS will be developed to overcome the problems of traditional sensors, such as big in size, high power consumption, detection by discrete devices, frequent maintenance, with secondary pollution, etc. Solid-state multi parameter sensitive electrode and the reference electrode will be developed by researching on novel nano oxide materials and by researching on the fabrication and packaging method of solid electrolyte in the micro scale. The characters of anti pollution, selectivity and stability of the microsensor could be improved by exploring the synergistic sensitization mechanism of composite nano materials. Nitrate could be directly detected in drink water by using micro nano composite structure to promote the electron transfer efficiency of electrochemical electrodes. The method of multi-parameter on-line mutual calibration can be established by studying the method of multi-parameter integration and multi-sensor fusion . And the detection accuracy of the sensor can be improved. To improve the stability of the sensor, the on-line renewal method of the electrode will be studied. Miniaturized solid state multi-parameter integrated water quality online monitoring sensor and system with good performance of anti pollution and stability will be developed, which will provide effective technical support for the continuous online monitoring of the drinking water.

面向饮水安全分布式在线监测需求，针对饮用水关键指标pH、ORP、硝酸盐、温度、电导率，对多参数集成微传感器的关键技术开展研究。通过对传感器敏感材料、敏感机理以及制备工艺的研究，结合微加工技术，研制多参数集成的水质在线监测传感器，克服现有传感器体积大、功耗高、分立检测、维护频繁、存在二次污染等诸多问题。探索新型氧化物纳米材料以及电解质微尺度区域固相化加工、封装方法，实现全固态的多参数敏感电极和参比电极；探索复合纳米材料的协同增敏机制，提高抗污染、选择性和稳定性；利用微纳复合结构对电化学电极电子传递效率的促进作用，实现水中硝酸盐离子的直接检测；研究多参数集成与功能融合方法，研究并建立多参数在线相互校准的方法，提高测试的准确性；研究电极表面在线更新的方法，提高系统的稳定性；最终研制出微型化、全固态、抗污染、稳定性好的多参数集成水质在线监测传感器与系统，为饮用水的在线连续监测提供有效的技术支撑。

课题面向饮用水水质的现场、在线监测需求，针对水质关键指标，对多参数集成微传感器的关键技术开展研究。课题研究了多参数水质监测传感器的敏感机理和信号转换机制，研究水质检测敏感材料以及简单、可控的敏感膜制备方法，研究多参数传感器结构、材料、加工方法的兼容化和协同化设计，结合微加工技术，研制了水质多参数集成微传感芯片，集成pH敏感电极、固态参比电极，以及电导率、温度、氧化还原电位（ORP）传感电极以及超微阵列电极，其中超微阵列电极根据敏感膜修饰的不同能够实现硝酸盐、溶解氧、重金属铜离子等的检测。研制的水质多参数集成微传感器与系统提高了水质检测传感器的集成度，克服了现有检测系统体积大、功耗高、分立检测、存在二次污染等问题，为水质的现场快速检测提供了一种有效的技术。