基于蝴蝶鳞片单梯度结构的多变量仿生气敏元件研究

It has been a key technical problem for the gas monitoring and detection equipment to efficiently identify and quantify the single target gas in the gas mixture. However, the iridescent scales of butterfly in nature give a highly selective response to the mixed gas only using a single gradient structure, which has a higher sensitivity and stability. So, the nanoscale gradient structures in the typical butterfly wing scales will be selected as the target object. Then, the bionic design and manufacture for the nano bionic gas-sensing component will be in-depth studied. Through discussing the multivariable mechanism between the properties of the gradient structure and the detected gas (surface tension, molar volume, and molecular shape and size of the gas) and its gas sensitive properties, the mechanism of the multivariable and selective gas-sensing properties of the single gradient structures in butterfly wing scales for the multicomponent gas will be revealed. The design principles and methods of new bionic multivariable gas-sensing component will also be proposed. The integrated mothod of the vapor deposition, deep ultraviolet lithography and wet etching will be used to manufacture the bionic multivariable gas-sensing component, which has higher selectivity, sensitivity and stability. Two key scientific questions will be addressed: 1) the selective gas-sensing mechanism of the single gradient structures in butterfly wing scales to the multicomponent gas mixture and its multivariable mechanism; 2) the bionic principles and manufacturing methods based on the mechanism of the gas-sensing properties of the typical butterfly scales. The works in this project would have important theoretical and engineering applications value for improving the selectivity, sensitivity and stability of the gas monitoring and detection equipment.

高效辨别和量化混合气体中的单组分一直是气体检测及探测装备面对的技术难题，自然界中的蝴蝶鳞片仅利用单一的梯度结构便实现了对多组分气体的高度选择性响应，具有较高灵敏度和稳定性，本项目以典型蝴蝶鳞片纳米梯度结构为对象，重点进行多变量气敏元件的仿生设计和制造研究，通过研究梯度结构表面张力和气体分子的形状、大小和摩尔体积对其气敏特性的多变量作用机制，揭示翅鳞表面单梯度结构对多组分气体的多变量气敏特性机理，提出仿蝴蝶鳞片梯度结构的新型多变量气敏元件的仿生设计原则和方法，综合利用气相沉积、深紫外光刻和湿法刻蚀等工艺，制造仿生多变量气敏元件，使其具有高选择性、灵敏度和精度。拟解决的关键科学问题：典型蝴蝶鳞片单梯度结构对多组分气体的选择性敏感特性机理及其多变量作用机制，基于蝴蝶梯度结构的多变量气敏元件的仿生原理与制造方法。项目研究对于提高气体检测及探测装备的选择性、灵敏度与稳定性具有重要的理论和应用价值。

高效辨别和量化混合气体中的单组分一直是气体检测及探测装备面对的技术难题，自然界中的蝴蝶鳞片仅利用单一的梯度结构便实现了对多组分气体的高度选择性响应，具有较高灵敏度和稳定性，本项目首先确定了大蓝闪蝶翅膀鳞片对气体的最强敏感性，获得了大蓝闪蝶的结构特征参数，建立了大蓝闪蝶翅膀鳞片的结构特征模型，分析了其对乙醇、乙醚、水蒸气、乙醇气体、乙醚气体、二氧化碳气体的敏感特性机理。从光子晶体及衍射光栅等光学理论出发，建立大蓝闪蝶翅膀鳞片的结构模型，采用多层薄膜干涉理论计算分析了其敏感机理，利用理论计算以及Translight光学模拟，获得了模拟结果，通过对比分析生物样本的试验结果，多层薄膜干涉理论计算结果以及模拟结果，揭示了大蓝闪蝶翅膀鳞片对气体的敏感特性。. 利用单次生物模板法对其进行仿生制造，并对其显微形貌进行了多尺度表征。采用溶胶凝胶和选择性腐蚀相结合的方法，成功地制造出两种仿生复杂感知功能表面，其特征尺寸与生物原型在同一尺度范围，是多尺度复杂微纳结构仿生制造的可行方案。提出了仿生全角度光学自稳定反射传感器的设计方法，以小天使凤蝶绿色翅鳞为原始生物模板，通过对投料比和煅烧温度等工艺参数的调控，从而实现了对全角度光学自稳定反射传感器的仿生制造，得到具有凹面弧度的凸包结构，增加了仿生传感器的受光面积和反射角度。并有望为新型仿生光学传感器的设计和研制提供一套可行的方案。本项目的研究将为开发具有混合气体选择性检测功能的多变量气体传感器研究奠定理论和技术基础，对气敏传感器的基础研究和推广应用具有重要意义。