基于蝴蝶鳞片光响应表面的仿生非接触传感器件研究

The traditional contact measurement technologies have some inherent limitations, such as measuring force, longer measure time, probe radius compensation, not suitable for measuring elastic and brittle materials. So, it cannot meet the needs of the development of modern industry. In recent years, the optical non-contact measurement technology has overcome the above defects and has become a hot spot. However, its complex equipment structure, disturbed easily and poor stability have seriously restricted its rapid development..After billions of years of evolution, creatures in nature possess almost perfect structures and surface functions. Nature has experimented with various solutions to its challenges and has improved the successful ones, which can provide ready answers to scientific and technical problems and inspire us with a series of novel designs and high-performance structures. In particular, the butterfly, famous for its iridescence wing scales, has gradually evolved a diversity of functions. Through experiments, it was found that the ingenious structures of some butterfly wing scales have an excellent spectral response effect to the changes of the environmental physical quantities. It has the features of simple, high precision and anti-interference. However, for the way of its high sensitive and selective detection, we just know "it is so", but we don't know “why”. Some problems, such as its structure, characteristics, mechanism and bionic principle, are all unclear, especially for biomimetic non-contact optical sensors with a broad application prospect. Here, this project mainly focus on two scientific problems: The mechanism of photosensitive non-contact sensitive characteristics of the light response structure on a typical butterfly wing scales to the multi-physical changes, its bionic micro-nano manufacturing. First, we will measure its light response characteristics, structures, shapes and material parametric representation and its modeling. Then, we should study the characteristics of its high precision sensing, the mechanism, mode and the influencing factors. Afterwards, we should reveal its many factors synergy mechanism between the changes of the external physical quantity and the light response characteristic. We may also put forward a new type of design principle and method for the the new bionic non-contact optical sensing element. In addition, we should also manufacture the bionic non-contact optical sensors using multiple manufacture technologies as well as its performance testing and explore its practical application. The related research in this project has very important fundamental theoretical significance and engineering application value for the new type of non-contact sensors.

非接触式传感技术因克服了传统接触传感技术固有缺陷，成为近年来传感技术一大热点，但其结构复杂、易受干扰且稳定性差，严重制约了其快速发展。师法自然，自然界中的蝴蝶翅膀能够通过其表面超精细光响应结构实现对多种物理量变化的快速、精准和非接触光谱响应，具有简单、高精度和抗干扰性。因此，本项目聚焦典型蝴蝶鳞片表面光响应结构对多种物理量变化的非接触光敏传感特性机理及其仿生微纳制造中亟待解决的关键科学问题，开展蝴蝶鳞片光响应特性、结构、形态和材料参数化表征与建模，研究其高精度传感特性、机理、模式和影响因素，揭示其对外部物理量变化的光响应特性的多因素协同作用机制，提出新型仿生非接触光敏传感元件的设计原理和方法，多工艺制造仿生非接触光敏传感元件并进行性能测试和应用探索研究，对新型非接触光敏传感技术的基础研究及其在自动控制和智能机器人等领域的推广应用具有极为重要的理论意义和工程应用价值。

师法自然，是人类在面临技术困境时向外界谋求突破的一种有效途径。向自然学习成为人类发展的永恒主题。本研究发现，蝴蝶翅膀表面具有超精细的纳米光响应结构，这种光响应结构对环境中的各种刺激（气体、液体、温度等）具有快速的光谱响应特性。更重要的是，这种响应是非接触的，并且在各种恶劣或者极端环境下仍然能够对外部刺激作出精准和可靠的光谱响应，对基于生物优异光响应特性的新型仿生非接触光敏传感技术的基础研究和推广应用具有重要意义。本项目从仿生学的角度出发，以Morpho didius蝴蝶为主要研究对象，深入研究了蝴蝶翅膀鳞片表面光响应特性的表面结构、材料对外部温度、气体及液体刺激的响应特性，揭示了其对外部单一和多重刺激的光响应特性的多因素协同作用机制，提出了基于蝴蝶鳞片光响应特性的新型仿生非接触光敏检测元件的设计原则和方法，开发的“三合一”湿化学法，证实了该方法是一种制造3D天然精细结构的有效途径，制造了一种具有类似“三明治”结构的超薄蝶翅仿生气体敏感功能表面，综合气相沉积，3D打印、深紫外光刻以及湿法刻蚀等工艺制造出了仿生非接触光敏检测元件，对多种有机气体如甲醇、乙醇、丙酮、乙醚、甲苯和二甲苯进行了实时检测，获得了响应光谱，对其反射光谱随折射率变化情况进行了模拟分析，揭示了蝶翅仿生功能表面多变量刺激敏感特性的内在机制，此外，还研发了具有自供能、防雾、自洁和减反多功能集成的仿生非接触传感器件。本研究为开发具有非接触快速和高精度检测功能的新型仿生非接触光敏传感器研究奠定理论和技术基础，对新型非接触光敏传感技术的基础研究和推广应用具有重要意义。