碳催化腐蚀制备有序硅微纳米结构中纳米碳的成膜行为及碳催化腐蚀机制研究

Due to their unique electrical, optical and thermodynamics properties silicon micro/nano structures have a vital application potential in areas like photovoltaic cells, information storage devices, thermoelectric devices, lithium-ion batteries and biological detection. The conventional micro/nanostructured silicon processing requires harsh conditions such as lithography, high temperature, high pressure and precious metals, that leading high production costs and low efficiency thus limiting development of silicon micro/nanostructure devices. This project will employ nano carbon thin film replacing precious metals as a catalyst to work at a condition of room temperature and normal pressure to achieve the goal of cheaply and massively prepare the silicon micro/nano-structures. At the same time we systematically investigate the attachment behavior of carbon quantum dots, carbon nanotubes, carbon nano-spheres, amorphous carbon nano film to the silicon substrate, also study the silicon conformal corrosion behavior and mechanism when catalyst by the nano carbon material thin film under a liquid or gas phase condition. Meanwhile, we will analyze the electrons distribution and band change at the carbon/silicon semiconductor interface and nano silicon structures formation mechanism during the corrosion processes for the purpose of fundamentally understand the preparation of silicon nano devices. This work will have important significance for the preparation of controllable nanomaterial in the future.

微纳米结构硅材料因其独特的电学、光学和热力学等性能，在太阳能光伏电池、信息存储器件、热电器件、锂电池、生物医药等领域具有重要的应用前景。常规的微纳米结构硅材料加工工艺过程需要光刻、高温、高压、贵金属等条件，面临着成本高、效率低等瓶颈，限制了硅微纳米结构器件的发展。本项目拟采用碳催化腐蚀法，在常温常压下，用纳米碳薄膜取代贵金属膜催化腐蚀硅，实现低成本、规模化制备高质量有序的微纳米结构硅材料。本项目拟将不同形貌纳米碳颗粒沉积在硅片表面，系统地探明碳量子点、碳纳米管、碳纳米球、非晶碳颗粒等纳米碳在硅基底表面成膜行为；研究纳米碳颗粒在氢氟酸气相和液相环境中催化硅共形腐蚀的行为及腐蚀动力学规律，分析碳/硅半导体界面处电子结构及能带变化规律，阐明碳催化腐蚀法制备有序微纳米结构硅材料的机制。旨在为微纳米结构硅材料加工提供理论基础，将对有序纳米材料的可控制备具有重要的意义。

硅微纳米结构材料在光伏电池、化学催化、热电器件、信息存储器件、锂离子电池、生物检测器件等领域具有重要的应用前景。围绕硅微纳米结构材料的制备，发展了很多技术，如气液固生长法、反应离子刻蚀等，但常规的硅纳米结构制备工艺过程需要高温、高压、贵金属等实验条件，造成生产成本高，限制了硅微纳米结构的大规模使用。本项目基于原电池反应机理，采用碳催化腐蚀法，在常温常压下，用纳米碳薄膜取代贵金属膜催化腐蚀硅，实现低成本、规模化制备高质量的微纳米结构硅材料。研究了将多种纳米碳材料沉积在硅片和硅粉末颗粒表面，系统地探明碳量子点、碳纳米管、碳球、非晶碳颗粒等纳米碳在硅表面成膜行为；研究纳米碳材料薄膜在氢氟酸气相和液相环境中催化硅腐蚀的行为及腐蚀动力学规律；通过优化碳膜种类、分布、厚度等因素，优化气相腐蚀环境中氧化剂和氢氟酸的分压，优化液相腐蚀环境中氧化剂浓度、溶液pH、离子种类和配比等条件构建桥联反应，促进碳催化硅腐蚀的发生和增速；建立碳催化硅腐蚀的电化学反应模型，阐明碳催化腐蚀法制备硅微纳米结构的机制，旨在为制备硅微纳米结构器件提供理论基础。本项目发展的这种碳催化刻蚀硅的宏量化制备技术对微纳米结构硅材料在催化、储能、检测等领域的推广应用具有重要的意义。