基于等效电路模拟方法的MEMS陀螺动态特性研究

MEMS gyroscope is the key device of inertial navigation system, and its parameter directly determines the performance of navigation system. Aiming at the dynamic characteristics of MEMS gyroscope, the methods based on quasi - static finite element simulation and discontinuous numerical solution are difficult to realize real-time and online measurement by means of general measurement and measurement for MEMS gyroscope with small structure, fast vibration and three - dimensional structure. In this paper, the dynamic equation of gyro structure considering nonlinear parameters is proposed for MEMS gyro dynamic system, and the gyro dynamic characteristic analysis method based on equivalent circuit is studied to explore the mechanism of gyro vibration. On the basis of this, the dynamic vibration characteristics of the MEMS gyroscope under the influence of the nonlinear parameters are studied, and the nonlinear parameter variation is given to the quantization error of the gyro output and the corresponding correction model is put forward. The gyro output under the influence of the nonlinear parameters Signal solving method, in order to achieve high precision gyro signal solution to provide theoretical and engineering support. Based on the theoretical analysis and experimental verification, a simulation method of MEMS gyroscope based on the operational amplifier model is proposed, which provides an efficient, real-time and reliable experimental system for the dynamic characteristics of gyroscope.

MEMS陀螺是惯性导航系统关键性器件，其参数指标直接决定着导航系统的性能。针对MEMS陀螺的动态特性研究方法，现阶段多基于准静态有限元仿真、非连续数值解算等，因MEMS陀螺结构小、振动快、立体结构等因素，通用检测测量手段难以实现实时在线测量。本项目针对MEMS陀螺动态系统，拟建立考虑非线性参数的陀螺结构动力学方程，研究基于等效电路的陀螺动态特性分析方法，探索陀螺振动机理。在此基础上，研究在非线性参数影响下的MEMS陀螺动态振动特性，给出非线性参数变化对应于陀螺输出的量化误差，并提出相应的修正模型；研究在非线性参数影响下的陀螺输出信号解算方法，为实现高精度陀螺信号解算提供理论和工程技术支撑。通过上述理论分析和实验验证，提出一种基于运算放大器模型的MEMS陀螺仿真模拟方法，为陀螺的动态特性研究提供高效、实时、可靠的实验系统。

本项目针对考虑非线性参数的MEMS陀螺特性分析方法进行研究，提出了基于模拟电路的等效仿真分析方法，构建了MEMS频率型陀螺的电路仿真分析系统，实现了在线、实时、动态模拟等效分析。首先，在理想频率型陀螺动力学方程集成上，构建了包含阻尼、驱动力等非线性参数的结构动力学方程，并采用不确定度方法分析了多结构参数的相互影响；然后，对基于模拟电路的等效分析方法进行了分析，提出了基于归一化和尺度变化的考虑非线性参数陀螺的电路等效模型，构建了对应的仿真分析电路平台，包括陀螺动力学方程等效电路和解算电路；最后，探索非线性参数在MEMS陀螺振动特性中的影响，分析非线性参数与陀螺输出影响量化关系，研究陀螺振动特性中间参数的变化规律，进一步揭示MEMS频率型陀螺工作机理。综上所述，本研究核心在于构建了考虑非线性模拟电路等效模型，为陀螺动态特性研究提供一种可行、实时、高效的实验系统平台。