基于石墨烯掺杂阻变效应的新型热释电红外探测机理及高性能器件研究

Low-cost, high-sensitivity infrared detectors have urgent application needs and huge markets in aerospace, spectroscopic instruments, and the Internet of Things.Due to the limitation of sensitive mechanism, material and fabrication process ability, the detectivity of thermal infrared detector cannot meet the new and high-end applications. Therefore, it is of great scientific significance and research value to explore and study the high performance infrared detectors based on new principles and materials. This application is innovative to propose a new infrared detector based on pyroelectric charge injection, graphene doping resistance mechanism, integrated super thin crystal tantalum, nanometer material and graphene sandwich structure, which greatly improves the detectivity. This application studies the physical mechanism of graphene-metal interface resistance and the electro-doping of graphite, which breaks through the high quality growth and transfer of the large area graphene material and the key technology for the preparation of super thin and high flatness pyroelectric single crystal. By solving these basic scientific and technological problems, a new type of infrared detector prototype with low cost and high performance is developed, which satisfies the demand of high-end applications, obtains independent intellectual property rights and provides a basic theory and method for the development of this field.

低成本、高灵敏度的红外探测器在航空航天、光谱仪器及物联网等多个领域有迫切的应用需求和巨大市场。由于敏感机理、材料和工艺水平局限，已有热敏型红外探测器的探测率等指标无法满足新兴、高端场合的应用。因此，探索和研究基于新原理、新材料的高性能红外探测器具有重要的科学意义和研究价值。本申请创新性的提出一种基于热释电致电荷注入、石墨烯掺杂阻变机理、集成超薄钽酸锂单晶、纳米材料及石墨烯的三明治结构新型红外探测器，大幅提高探测率。重点探明红外辐射—温度-电荷注入-掺杂阻变机理，建立系统理论模型；研究石墨烯电掺杂调制特性及石墨烯-金属界面接触电阻物理机制；突破大面积石墨烯材料的高质量生长、转移及超薄高平整度热释电单晶制备关键技术；通过这些基础科学技术问题的解决，研制出低成本、高性能的掺杂阻变机制新型红外探测器原型器件，满足高端应用需求，取得自主知识产权，为本领域的发展提供一种有较高参考价值的基础理论和方法。

红外探测器在航空航天、光谱仪器及物联网等多个领域有重要应用价值。基于热释电效应的红外探测器由于具有高探测率和快速响应的优点得到持续研究关注。精密分析仪器高端应用需求的出现需要对热释电探测器在基础理论和关键技术方面进行更加深入研究。项目聚焦热释电红外探测器敏感机理、纳米功能材料及传感器制备系列关键技术，得到以下研究结果：1）项目聚焦提升探测率目标，提出探索一种基于石墨烯掺杂阻变机理、制备并研究了一种基于石墨烯场效应晶体管热释电探测器件；2）提出一种面向于热释电探测器应用的中红外宽谱吸收高介电损耗多层复合纳米材料，在2.5-20.0 μm的中红外波段，吸收率可达90%。通过对麦克风效应深入研究设计了降噪方案以降低器件噪声，提升探测率；3）基于器件的自热效应，建立了器件热学参数的理论分析模型可有效提高器件的精度和使用寿命。对近红外光电探测器的噪声抑制及增益机制研究，提出了两种抑制噪声电流的方法，在保持快速响应的同时维持高的探测率。项目团队成果在J. Phys. Chem. Lett、J._Micromech._Microeng、Sensors and Actuators B: Chemical 、Micromachines、Biosensor等SCI期刊上共发表高水平文章18篇；申请发明专利8项。