伪火花放电等离子体极紫外光源辐射特性研究

Extreme ultraviolet radiation light source, which is produced by discharge plasma, is widely used in the high precision microscopic and extreme ultraviolet lithography. This project studies the extreme ultraviolet radiation based on repetitive frequency pseudospark discharge. To explore a novel light source with high energy and continuous extreme ultraviolet radiation, the breakdown characteristics of the repetitive frequency pseudospark discharge are firstly studied, and then based on the energy transfer characteristics and the match between the load and the power source, the characteristics of the extreme ultraviolet radiation are studied. The research contents mainly include: (1) investigate the influence of electrode structure, parameters of the trigger pulse and gas environment on the characteristics of the breakdown voltage, current, delay and plasma parameters; (2) study the evolution of the plasma channel and the space-time distribution characteristics of the plasma parameters; (3) establish the equivalent model of the plasma channel and the energy deposition efficiency of the plasma channel; (4) investigate the characteristics of the extreme ultraviolet radiation under matched load and explore the optimum design method of the extreme ultraviolet radiation light source based on repetitive frequency pseudospark discharge. This project aims to understand the plasma physics of the repetitive frequency pseudospark discharge and explore the mechanism of the extreme ultraviolet radiation, which will be helpful for the design of the extreme ultraviolet radiation light source based on pseudospark discharge.

气体放电等离子体极紫外辐射光源，在高精度显微、极紫外光刻等方面具有广泛的应用前景。本课题以伪火花放电等离子体极紫外辐射为研究对象，从重复频率伪火花放电特性研究出发，结合重复频率伪火花放电等离子体能量耦合特性和负载匹配时的极紫外辐射特性研究，探索新型高能连续极紫外辐射光源。主要研究内容包括：研究电极结构、触发脉冲参数、气体环境等对放电电压、电流、放电延时和等离子体参数的影响规律；研究伪火花放电等离子体通道的发展过程以及等离子体参数时空演变特性，在此基础上建立等离子体通道等效阻抗计算模型，计算等离子体通道能量沉积效率；在负载匹配情况下，研究重复频率极紫外辐射特性，并探索重复频率伪火花放电等离子体极紫外辐射光源的优化设计方法。本项目旨在深入认识和理解重复频率伪火花放电等离子体物理、极紫外辐射的物理机制，有助于重复频率伪火花放电等离子体极紫外辐射光源的设计。

气体放电等离子体极紫外辐射光源，在高精度显微、极紫外光刻等方面具有广泛的应用前景。重复频率伪火花放电等离子体为连续极紫外辐射提供了一种可能。本课题设计伪火花间隙负载，搭建实验平台，开展重复频率伪火花间隙放电特性研究。研究了单间隙和多间隙重复频率伪火花放电特性、建立了伪火花放电物理模型、掌握了放电过程中电子和离子时空分布特性，针对单间隙伪火花放电，进行了极紫外辐射的实验研究，获得不同放电电压下的极紫外辐射功率。