纳秒-飞秒组合激光制备高深径比微孔及其机理研究

With the increasing requirement on microhole's diameter and aspect ratio of many devices in various fields, fabrication of microhole with small diameter and high aspect ratio becomes the key to break performance limit of core components, such as the target inflating microhole on ignition device, microholes on high-sensitivity sensor, engine nozzle, gas turbine blade film and so on. This project focuses on high aspect ratio microhole. Using nanosecond pulsed laser and femtosecond pulse laser, microholes with high aspect ratio on various materials are prepared and its mechanism is studied. By adjusting pulse duration, intensity and delay time of nanosecond laser, variation of microhole's aspect ration is observed. Then, the corresponding mechanism is studied through liquid film method, blowing method and rational design on two pulses delay time. Combining two-temperature model and molecular dynamic model, theoretical model for two pulses fabrication is built. This study aims to provide a new method for high aspect ratio micro preparation and reveal its inner mechanism which has important applications in aerospace equipment , ignition devices and optoelectronic integrated device preparation .

随着各领域对器件中微孔的直径和深径比的要求与日俱增，制备小孔径、高深径比微孔成为突破核心部件性能瓶颈的关键所在，如点火装置中的靶充气微孔，高灵敏度传感器微孔，发动机喷油嘴微孔以及航天航空燃气涡轮叶片气膜微孔等等。本项目着眼于高深径比微孔，采用纳秒脉冲激光辅助开展飞秒脉冲激光制备高深径比微孔及其机理研究实验。通过调节纳秒激光的脉宽、光强以及延迟时间，观察微孔深径比的变化规律；通过液体薄膜法，吹气法以及合理设计两脉冲之间的延迟揭示双脉冲组合激光微孔制备机理所在；结合双温模型和分子动力学模型对双脉冲组合激光微孔制备进行理论建模。本研究旨在为高深径比微孔制备提供新的方法，揭示其内在机理，在航空航天设备、点火装置点火靶和光电集成器件制备方面有重要应用。

随着各领域对器件中微孔的直径和深径比的要求与日俱增，制备小孔径、高深径比微孔成为突破核心部件性能瓶颈的关键所在。本项目着眼于高深径比微孔，采用纳秒脉冲激光辅助开展飞秒脉冲激光制备高深径比微孔研究。实验上，我们研究了吹气法和延时法来观察制备所得微孔深径比的变化，在采用延时法时观察到了明显的深径比的增加，当飞秒激光和纳秒激光延时为0时，获得的微孔深径比最大。同时也研究了纳秒激光光强对微孔深径比的影响，本项目的研究结果对高精密光学器件中高深径比微孔的制备提供了一种可行的方法。