弯曲旋转超声马达理论模型和微型化研究

Abstract: The basic program of Bend Rotation Cylinder Tiny Ultrasonic Motor (BRCT-USM) was made. A new polarization method was developed for the stator and the gaps between two adjacent electrodes was carefully designed. The fabricated 10 tiny prototype motors have a diameter of 1mm, a length of 5mm and a weight of 36mg. Four electrodes were deposited on the stator's surface and evenly distributed along the circumferential direction. The BRCT-USM- our prototype motors show a performance with 1000-2000rpm speed and over 3mNm stalled torque; so it can be eventually widely used in MEMS and endoscopic systems. This is the most thin BRCT-USM in the world now.In the same time the power supply with a size of 3.2×4.6×1.4cm3 and micro force meter with resolution 0.001g were researched. Presently we are improving the preload method of the BRCT-USM continually and with the same technique, fabrication of even thinner motor- diameter of 0.5mm can be envisioned..

弯曲旋转超声马达在微机电系统、医疗和国防军事中具有广?的应用前景。由于驱动机理的复杂性，至今没有完善的理?模型，我们在研制直径10 m m 的夹式和直径5~ 2 m m 压电管弯? 旋转马达的过程中，为了优化设计，需建立弯曲旋转超声?达的理论模型；为了微型化需采用压电柱替换压电管。正在研制直径300 ~ 500 微米的、目前世界上最细的弯曲旋转超声马达。