毫米波高灵敏度超导钛转变边缘探测芯片研制

Most of Radiations from the universe fall in the millimeter & sub-millimeter wave band, so the band takes a very important role in astronomical observations. The millimeter wave band is particularly suitable for observing CMB polarization polarization, cold dark interstellar medium, and has an irreplaceable role in research topics such as early cosmic evolution, primary gravitational wave exploration, star formation, and galaxies evolution. Superconductor based bolometers (also known as transition edge detectors, TES) have ultra-high sensitivity, easy to integrate on a large scale, and relatively more mature readout circuits. They are the preferred detectors for millimeter wave imaging observations in the world. China is also promoting the construction of a millimeter-wave observation project for CMB. This application is aimed at the development of detectors for millimeter wave observation applications in China. This application intends to develop a dual-band dual-polarization, suitable response time and ultra-high sensitivity TES detector chip based on superconducting titanium Ti, which will promote the development of millimeter wave detection technology in China and lay a key technical foundation for CMB polarization observation application. It also provides reference for related applications such as biological detection and safety inspection.

来自宇宙的辐射大部分落在了毫米波和亚毫米波频段，使得该波段在天文观测中有举足轻重的作用。毫米波段特别适合观测冷暗星际介质，CMB极化偏正，在恒星形成、星系演化、早期宇宙、寻找引力波等研究课题上具有不可替代的作用。基于超导的热辐射计探测器（又称转变边缘探测器，TES）具有超高灵敏度、易于大规模集成、较为成熟的读出电路，是目前国际上毫米波成像观测的优选探测器。我国也正在推动建设面向CMB的毫米波观测项目，本申请正是面向我国的CMB观测应用开展探测器研制。本申请拟研制基于超导钛Ti的双频段双极化、合适响应时间、超高灵敏度的TES探测器芯片，将推动我国毫米波探测技术的发展，为CMB极化观测应用打下关键技术基础，同时也为生物探测、安全检查等相关应用提供参考。

来自宇宙的辐射大部分落在了毫米波和亚毫米波频段，使得该波段在天文观测中有举足轻重的作用。毫米波段特别适合观测冷暗星际介质，CMB极化偏正，在恒星形成、星系演化、早期宇宙、寻找引力波等研究课题上具有不可替代的作用。基于超导的转变边缘探测器（TES）具有超高灵敏度、易于大规模集成、较为成熟的读出电路，是目前国际上毫米波成像观测的优选探测器。我国也正在推动建设面向CMB的毫米波观测项目，本项目正是面向我国的CMB观测应用开展探测器研制。通过研究TES阵列芯片电路，包括信号接收、输运、滤波、吸收与响应等，设计了基于超导钛Ti膜的220GHz频段超高灵敏度TES阵列芯片电路。通过研究TES阵列芯片的制备工艺，包括超导Ti膜生长、接触电极、刻蚀等，制备出了超导Ti TES阵列芯片，实测结果显示220GHz频段TES的噪声等效功率NEP 为 4.5×10-17 W/sqrt(Hz)。本项目的研究为我国毫米波观测项目打下关键技术基础。