超导相变边缘传感器单光子探测关键技术研究

Superconducting Transition-Edge Sensor (TES) single-photon detectors are with broad bandwith, fast response and energy-resolving capability. TES is a promising candidate for optical/infrared high resolution astronomical observations. This program focus on device design and fabrication as well as device packaging with the goal to increase system efficiency and energy resolution. We measure the residual resistivity and critical temperature of superconducting titanium film and analyze the relation between energy resolution and the residual resistivity and critical temperature. We optimize the optical cavity to increase the absorption efficiency. We design new packaging structures to stably reduce the loss of coupling between optical fiber and the detector. Through the program, we make a TES package with high system efficiency and high energy resolution. This package may be tested on a Chinese optical telescope in future.

超导相变边缘传感单光子探测器（TES）具有响应谱宽、响应速度快和可分辨光子能量等特点，是光学红外高时间分辨率天文观测的热门候选器件。本项目以提升系统探测效率、提高能量分辨率为指导思想，重点针对器件设计及制备技术、器件封装技术开展研究。本项目实验研究超导钛膜剩余电阻率和转变温度的关系，分析其对TES能量分辨率的影响；研究和优化集成光学腔，提高光吸收效率；探索新型封装结构，实现稳定高效光耦合。本项目研制具有较高系统探测效率和能量分辨率的TES单光子探测器模块，未来可望在国内通用光学望远镜上进行试验观测。

超导相变边缘探测器（TES）具有时间分辨和能量分辨等特点，是下一代光学红外天文观测的有竞争力的候选探测器。本项目以提升系统探测效率、提高能量分辨率为指导思想，重点针对器件设计及制备、器件封装开展研究。改变制备条件制备不同样品并测试，研究了超导钛膜制备工艺与剩余电阻率等特性相关性。集成光学腔提高器件对1550-nm波长光的吸收效率。优化封装结构，提高光纤对准耦合效率，实现系统效率优于10%的封装TES单光子探测器集成模块。实验表征研究了小体积Ti TES探测器特性，获得比理论预期更快的响应速度。本项目按研究计划进行，预期成果基本实现，成功研制单光子探测器模块。该模块未来可望在国内通用光学望远镜上进行试验观测。