新型超精密并联XY平台设计关键技术研究

Aimed at the urgent needs of motion platform with high-speed, high-acceleration and quick-response, a novel design method of parallel ultra-precise motion platform with DCG system is proposed, in order to solve the problem of limited work space, complex dynamics modeling and motors multi coupling synchronization control in parallel motion platform. Many-degree-freedom dynamics equation is built, and multi motors synchronization control method to the PMT with redundant actuation is developed. With the support of experiment flat, a new motion platform of high-acceleration and high-precision is built. In this project, the research is including the design method of parallel XY platform with orthogonal limbs and DCG technology, centralized-distributed dynamics equation system with multi-input multi-output, and multi motors coupling synchronization control based on position decoupling with orientation. After these researches, the platform performances are verified through experimental platform. This technology will develop comprehensive performance index of parallel platform, reduce the cost of platform and support the development of high performance platform in the future. So it has an important value of academic research, scientific exploration and engineering application.

针对芯片制造和微型零件装配等领域对运动平台高速度和加速度、nm级动态精度等指标的迫切需求，结合现有并联平台存在的作业空间有限、动力学建模复杂和多电机耦合同步控制难等问题，提出一种基于DCG技术的新型超精密并联XY平台设计方法，并建立系统的多自由度动力学模型，构建适用于冗余并联驱动的多电机同步控制方法，搭建实验验证平台，最终开发出具备实现高加速度和高精度等指标的新型XY运动平台。主要开展并联结构XY平台实现正交运动和DCG的设计方法，相应系统的多输入多输出集中-分布动力学建模和基于姿态解耦的多电机同步耦合控制等关键技术的研究，并开展相关实验研究，使平台性能得到最终验证。该技术将大幅度提高同类型平台的综合性能指标，降低平台的制造成本，为高性能运动平台开发提供新理论和新方法，具备重要的学术研究价值、科学探索意义及工程应用前景。

针对芯片制造和微型零件装配等领域对运动平台高速度和加速度、nm级动态精度等指标的迫切需求，解决了现有并联平台的作业空间有限、动力学建模复杂和多电机耦合同步控制难等问题，设计了一种基于DCG技术的新型超精密并联XY平台，并搭建了实验验证平台。理论上分析了并联结构的DCG设计方法，研究了集中-分布动力学建模和多电机同步耦合控制等关键技术。建立了系统的多自由度动力学模型，构建了针对该平台的3自由度冗余的并联驱动多电机同步控制方法。实验验证表明，该技术可大幅度提高同类型平台的综合性能指标，为高性能运动平台开发提供新理论和新方法，具备重要的学术研究价值。