磁悬浮式溯源触针表面形貌测量关键技术和理论的研究

Due to stylus movement performances affect the measuring precision, magnetic levitation technology can provide high precision controlled moving support without friction for stylus, which is the key to improve the accuracy of measurement of surface topography. This project researches some key techniques and theories of the traceable magnetic levitation stylus measurement based on dynamics and electromagnetic theory. The magnetic levitation technology of stylus support is studied on diversified coupling mechanism of stylus spindle, which helps for the design of stylus magnetic levitation bearing mechanism and the analyses the static and dynamic characteristic of the stylus movement. Based on electromagnetic control theory and technology, the control and optimization of stylus measuring force are realized. Optical frequency subdivision technology of nanometer displacement measurement system is researched; a traceable stylus surface topography measurement system is developed to measurement surface topography of micro-nano manufacturing, mechanical processing, and optics, The measurement system researched by the project eliminates the Abbe error and non-linearity error on system theory, and optimizes the contact model of between stylus and the measured surface in the measuring process, which improves the measurement resolution and accuracy to meet the need of geometric measurement for the precision and ultra-precision machining, micro-manufacture, optics and other fields.

触针的运动特性影响着测量精度，磁悬浮技术能够无摩擦地为触针提供高精度可控的运动支承，是提高表面形貌测量精度的关键。本项目基于动力学和电磁理论，对磁悬浮溯源触针测量的关键技术和理论进行了研究；研究磁悬浮触针支承技术，分析磁悬浮触针主轴系统的多耦合机理，设计触针磁悬浮支承运动机构，分析触针运动的静态和动态特性；研究电磁控制技术和理论，实现触针测量力的控制和优化；研究基于光学倍频细分技术的纳米位移计量系统，研制可溯源触针悬浮式表面形貌测量系统，实现机械加工、微纳制造和光学等微纳表面形貌测量。本项目研究的测量装置从系统原理上消除阿贝误差、非线性误差，优化测量过程中的触针与被测表面的接触模型，提高测量分辨率和精度，满足精密和超精密加工、微制造、光学等领域对几何量测量的需要。

触针表面测量仪器具有测量精度高、灵敏度高、动态特性好、测量可靠等优点，一直是生产科研中应用最广的表面测量仪器，但是现有触针位移传感器的杠杆运动结构带来的非线性误差是影响测量精度的主要因素。本项目基于悬浮支承技术，研究了悬浮式触针表面形貌测量方法和技术，对测量系统的关键理论和技术进行分析和研究。基于动力学分析，建立了悬浮触针测量的数学模型，分析了悬浮式触针表面测量的基本理论；基于电磁悬浮技术，设计了磁悬浮触针位移传感器，试验测试和分析了测量性能，并进行了结构优化设计；研究了测量力的电磁控制方法和技术，大行程气浮位移驱动技术，以及基于光学倍频细分技术的纳米位移计量系统；研制了悬浮式触针表面测量系统，进行了实验测试，并分析了测量性能。本项目研制的悬浮触针式表面形貌测量系统，从系统原理上消除阿贝误差、非线性误差，提高了测量精度，能够满足精密和超精密加工、微制造、光学等领域对表面形貌测量的需要。