TaN/Cu纳米多层膜高温摩擦学及其润滑相缓释效应

The high temperature tribological properties improves when TaN film is composited of Cu. It is hoped to get an advanced tool coating that used to dry cutting in aerospace. While it's run out quickly since Cu diffuses fast towards surface. In this proposal, the TaN/Cu nano multi-layer film will be designed and prepared. It will depressing the diffusion of Cu because of barrier effect of TaN layer, and optimize TaN phase structure, so the Cu composited Ta2O5 film will formed on multilayer film and prolong the lifetime during high temperature tribology. The details are follows: first, designation and preparation of TaN/Cu nano multilayer film with controllable TaN structure by magnetron sputtering combining ion beam assisted bombardment technique; second, investigation the superhardness effect on the wear resistance of nano multilayer under high temperature; third, investigation the effects of TaN structure and modulation ratio on Cu diffusion during wear; forth, investigation the effect of Cu diffusion on formation of lubrication film. By post examination and analysis of worn tracks, it reveal the mechanism of high-temperature tribological behavior. It is expected that this proposal could be valuable for the designing of drying cutting tool coatings used in the aerometals.

Cu复合TaN薄膜具有较好的高温摩擦学性能，有望用作航空航天工业干切削加工中的先进刀具涂层，但润滑相Cu在高温摩擦过程中快速向膜表面扩散消耗使其过快失去自润滑效果而影响使役寿命。针对上述问题，本项目将抗磨相TaN和润滑相Cu设计制备成TaN/Cu纳米多层膜，在利用纳米多层膜超硬效应的同时，通过TaN的阻挡作用控制Cu向摩擦层逐次释放，实现其长寿命高温摩擦使役。采用离子束辅助轰击和磁控溅射沉积技术制备TaN/Cu纳米多层膜，通过研究调制周期、界面反应、TaN结构、温度和摩擦耦合等对Cu向膜表面扩散的影响，阐明高温摩擦时Cu在纳米多层膜中的表层缓释机理；通过研究Cu与TaN协同摩擦化学反应对多层膜表面润滑膜形成的影响，揭示多层膜高温抗磨减摩机理及失效机制。本项目研究结果可丰富纳米多层膜设计及其高温摩擦学理论，同时为我国航空航天用合金高速精密干切削刀具涂层的开发提供理论依据和技术支持。

Cu复合硬质相薄膜具有较好的高温摩擦学性能，有望用作航空航天工业干切削加工中的先进刀具涂层，但润滑相Cu在高温摩擦过程中快速向膜表面扩散消耗使其过快失去自润滑效果而影响使役寿命。针对上述问题，本项目将抗磨相Ta、W和TaN与润滑相Cu复合，设计制备成TaN-Cu、Ta-Cu和W-Cu纳米多层膜，在利用纳米多层膜超硬效应的同时，通过阻挡相的阻挡作用控制Cu向摩擦层逐次释放，实现其长寿命高温摩擦使役。采用离子束辅助轰击和磁控溅射沉积技术制备TaN和纳米多层膜，研究结果表明（200）取向的δ-TaN致密且结晶性好，磨损率为2.4×10-6mm3/N·m，润滑相Cu复合后，致密度和膜基结合强度进一步提高，磨损率降进一步降低。随后，通过磁控溅射共沉积的方法制备了润滑相Cu与硬质相Ta、W组成的纳米多层膜，研究了调制周期、界面反应、相结构、温度和摩擦耦合等对Cu向膜表面扩散的影响，阐明了高温摩擦时Cu在纳米多层膜中的表层缓释机理；通过研究Cu与硬质相协同摩擦化学反应对多层膜表面润滑膜形成的影响，揭示多层膜高温抗磨减摩机理及失效机制。本项目研究结果可丰富纳米多层膜设计及其高温摩擦学理论，同时为我国航空航天用合金高速精密干切削刀具涂层的开发提供理论依据和技术支持。