(Ti,Al,Si)N-MoS2-Ag/TiAlN纳米多层涂层低高温循环磨损自适应机理研究

In this project, (Ti,Al,Si)N-MoS2-Ag/TiAlN nano-multilayers will be deposited for the good lubrious properties of MoS2, Ag and (Ti,Al,Si)N at lower,medium and high temperatures and the confined diffusion effects of Ag by TiAlN layers. The self-adaptive antifriction mechanism of the multilayers in wide temperature range and wearing cycles in low and high temperatures will be investigated. Firstly, the stability mechanism at medium and high temperatures and interreactions of the (Ti,Al,Si)N-MoS2-Ag composite coatings will be studied by transmission electron microscope, scanning electron microscope, electronic probe microscopy, differential thermal analyzer, thermogravimetric analyzer, et al. And then, the thermal shock resistance and the confined diffusion mechanism of Ag in the (Ti,Al,Si)N-MoS2-Ag/TiAlN nano-multilayers in the vertical and horizontal direction to the coating surfaces for normal and fractured samples will be researched. The self-adaptive mechanism of the nano-multilayers will be concluded by combining their mechanical properties and wear mechanisms resulted from wearing at different temperatures and in low temperature to high temperature cycles. The innovation points of the project lie in the realization of the self-lubrication and confined diffusion of Ag in wide temperature range for the nitride coatings by combining several lubricious components and nano-multilayer structure. The project contributes to construct new self-adaptive nitride coatings in theory and practices. It is significant to promoting green manufacturing, energy saving and its consumption reduction.

利用MoS2、Ag、(Ti,Al,Si)N在低温、中温、高温具有良好的润滑特性，以及TiAlN层对Ag的扩散阻挡效应，制备(Ti,Al,Si)N-MoS2-Ag/TiAlN纳米多层涂层，探索其在宽温域和低高温循环磨损中的环境自适应减磨机理。首先利用透射电镜、扫描电镜、电子探针、差热仪、热重仪等研究(Ti,Al,Si)N-MoS2-Ag复合涂层在中高温的稳定性机理和相互作用机制；然后利用常规样品和缺口样品研究(Ti,Al,Si)N-MoS2-Ag/TiAlN多层涂层在垂直和平行涂层表面方向对Ag的约束扩散机制及其抗热震机理；通过力学性能、不同温度和低高温循环耐磨机理分析，获得其自适应机理。多润滑组元结合纳米多层结构实现氮化物涂层在宽温范内自润滑和Ag的约束扩散，是本项目的创新之处。本项目为建立新型自适应氮化物涂层奠定坚实的理论和实践基础，对于推动绿色加工发展及其节能降耗具有重要现实意义。

采用SEM/EDS、XRD、XPS、纳米压痕和高温磨损试验机等研究了多种氮化物涂层微观结构，硬度，在室温、200℃、400℃、600℃、室温至600℃和600℃至200℃、退火等条件下的磨损性能，探索MoS2、Ag等协同减磨机制。结果发现：.高硬度和硅氧化物是溅射TiAlSiN涂层在600℃具有优异耐磨性的主要原因，其硬度为29.1GPa，比溅射TiN和TiAlN涂层提高1.67倍和1.16倍，600℃时磨损率为0.0894×10-3mm3/(Nm)，分别比后二者降低了38.8%和26.8%。.Mo、S元素主要以MoS2形式存在TiN涂层中，硬度为13.718GPa，室温和200℃磨损率为0.0696×10-3和0.0332×10-3mm3/(Nm)，比TiN涂层降低74%和37.6%。.TiAlAgN涂层硬度为22.313GPa，在400℃和600℃时磨损率为0.0524×10-3和0.0498×10-3mm3/(Nm)，磨损率比TiAlN涂层降低15.4%和59.2%。在600℃退火3h后，表面有微裂纹和Ag颗粒富集，耐磨性下降。.以TiAlSiN为基的含MoS2、Ag的复合涂层，均能相应提高TiAlSiN涂层在室温、400℃的耐磨性能。随着MoS2、Ag含量的提高，前者耐磨性提高，后者耐磨性下降。优选条件下制备TiAlSiN-TiAlAgN-Ti(Mo)N/MoS2复合涂层，在室温、200℃、400℃和600℃发生黏着磨损，磨损率分别为0.068×10-3、0.052×10-3、0.045×10-3和0.041×10-3mm3/(Nm)，室温-600℃和600℃-200℃变温条件下磨损率为0.044×10-3和0.038×10-3mm3/(Nm)，具有自适应减磨特性。退火后耐磨性略下降。.单层厚200nm的TiAlSiN/TiAlAgN/Ti(Mo)N-MoS2多层涂层，在不同温度下均以黏着磨损为主，由于Ti(Mo)N /MoS2高温磨损性较差，在600℃磨损率达到0.093×10-3mm3/(Nm)，为离子镀TiAlSiN涂层的2.46倍。升温和降温的磨损率分别为0.093×10-3和0.065×10-3mm3/(Nm)。. MoS2和Ag协同作用，能够提高TiAlSiN涂层宽温范和变温耐磨性能，对丰富氮化物涂层减磨机理，促进其推广应用，具有重要意义。