超薄X射线掠入射反射镜高精度制造技术研究

In order to meet the requirements of high sensitivity and lightweight of grazing incidence optical system for space X-ray telescopes, the manufacturing technology of high-precision and high-efficiency Wolter I grazing incidence ultra-thin mirror will be studied. To solve the problems existing in the process of manufacturing X-ray ultra-thin mirror by high-temperature shape replication technology, the process and mechanism of vacuum high-temperature shape replication technology will be studied, and the finite element simulation model of the technology will be established. The ultra-smooth, high-precision and high-efficiency MR processing technology will be used to remove the non-uniformity of thickness of the substrate material . And to improve the accuracy of shape replication, the optimization with FME simulation model and real manufacturing process will be carried out. After all, a non-contact 3d mirror shape measurement technique based on spectral confocal sensor will be studied. Through the above research, this project will master high-precision Wolter-I ultra-thin X-ray grazing incidence mirror manufacturing method, developing ultra-thin X-ray mirror which's shape accuracy will be better than 500 nm, surface roughness be better than 0.6 nm, to meet the requirements for space X-ray telescope.

面向空间X射线望远镜对掠入射光学系统高灵敏度和轻量化的需求，研究高精度、高效率的Wolter I型掠入射超薄反射镜制造技术。为了解决目前高温面形复制工艺制造X射线超薄反射镜过程中存在的问题，研究真空高温面形复制技术的 工艺过程机理，并建立该技术的有限元仿真模型；研究采用超光滑、高精度、高效率的磁流变加工工艺去除超薄反射镜基底材料的厚度非均匀性；通过模型仿真优化和试验过程优化，提高非接触式高温面形复制工艺精度；研究基于光谱共焦传感器的非接触式三维反射镜面形测试技术并开展超薄掠入射反射镜面形测试。通过上述研究，本项目将掌握高精度Wolter-I超薄掠入射反射镜制造方法，研制出镜片面形精度PV值优于500nm、表面粗糙度优于0.6nm超薄掠入射反射镜，满足空间X射线天文探测对掠入射成像系统轻量化和高灵敏度的要求。

按照研制计划，针对空间 X 射线望远镜对掠入射光学系统高灵敏度的要求，对高精度、高效率、轻量化的超薄Wolter I型掠入射光学反射镜制造技术进行了研究。首先分析了目前高温面形复制技术存在的问题，提出了可行的技术路线；然后，研究了高温面形复制过程机理并建立了有限元模型仿真；其次，研究了基底材料厚度非均匀性去除方法，将基底材料厚度误差有μm量级提升到100nm量级；接着，通过模型研究了影响高温面形复制精度的各项，对工艺流程进行了优化，并制备了一套超薄Wolter I型掠入射光学反射镜；最后，建立了基于非接触超薄 Wolter I 掠入射反射镜面形检测装置，对制备的超薄Wolter I型掠入射光学反射镜进行了面形、粗糙度检测，检测结果表明达到了预期目标。