二维PLZST反铁电光子晶体制备及其光子带隙的场控机理研究

Antiferroelectric ceramic because of its advantages of high refractive index and good coupling is widely used in the fabrication of tunable band gap photonic crystal, but the existing fabrication process has some problems such as parameter inaccuracy and process is not controlled. This subject will simulate analysis and design two-dimensional photonic crystals structure parameter based on the Maxwell's electromagnetic theory and FDTD algorithm by using OptiFDTD software, research the complete fabrication process of PLZST antiferroelectric ceramics photonic crystal based on Sol - Gel method in SSO template. By microscopic analysis and testing of electrical and optical parameters, we will study the influence of the dielectric constant of the match, the grain boundary effect and surface tension to ferroelectric ceramic photonic crystal optical and electrical properties. We will shift the antiferroelectric ceramic photonic crystals on the quartz glass sputtering Pt electrode using chemical methods, test electro-optic coefficient and the transmission spectrum in PLZST photonic crystal under the action of electric field based on Michelson interference principle and the fiber internet and grating coupling technology, and ferroelectric ceramic phase change process, electro-optic effect and PLZST photonic crystal band gap regulation mechanism under electric field induction will be studied. Fabrication methods of ceramic photonic crystals will be studied and electro-optic effect and PLZST antiferroelectric ceramics photonic crystal band gap regulation theory will be discussed in this project, which will have an important significance, and will promote photonic crystal applications in optical communication and integrated optoelectronic devices effectively, and will condens technology talents for the ethnic minorities in China.

反铁电材料因为其折射率高、耦合性强等优点被广泛用于制备可调带隙光子晶体，但现有的制备工艺存在参数不精确和过程不可控等问题。本项目基于麦克斯韦电磁场理论和FDTD算法，通过软件模拟仿真设计二维光子晶体结构参数，研究基于SSO模板和Sol-Gel工艺制备PLZST反铁电光子晶体的新方法。通过微观分析和电学、光学参数测试，研究介电常数匹配、晶界效应、表面张力等对反铁电光子晶体光学性能的影响。采用化学方法将PLZST光子晶体转移到溅射有Pt电极的石英玻璃上，基于分光光度计工作原理和光纤传输、光纤耦合技术，测试电场作用下PLZST光子晶体的透射谱和损耗率，研究电场诱导下反铁电材料的相变过程和PLZST反铁电光子晶体的带隙调控机理。本项目将对研究PLZST光子晶体制备方法和反铁电光子晶体的带隙调控理论有重要意义，促进光子晶体在光电子集成器件领域的应用研究，并为少数民族地区凝聚科技人才。

本项目根据光通信应用需求，确定入射光的中心波长和光子带隙宽度，基于反铁电光子晶体结构参数计算和模拟仿真结果，设计PLZST反铁电光子晶体的制备工艺。以乙酸铅、钛酸四丁酯、醋酸镧、正丙醇锆等为主要原料采用Sol-Gel方法制备PLZST溶胶和薄膜，实验结果表明，PLZST薄膜厚度与匀胶次数成正比，表面均匀、无裂纹、平均粗糙度小于20nm。本项目采用Sol-Gel法制备了一维多层膜PLZST/MgO光子晶体，PLZST和MgO薄膜的厚度分别为155nm和204nm。测试结果表明：一维PLZST/MgO反铁电光子晶体禁带中心位于～1500nm，在禁带中心处光透过率为54%，对波长1550nm的通信光源有一定的抑制作用，一维光子晶体的透射谱在861nm附近观察到一个明显的反射峰，最小透射率接近20%，在1×104 V/mm的直流电场作用下，PLZST薄膜的折射率变化率为0.92%，实现了带隙中心波长偏移12nm。本项目研究了基于SSO模板和基于ICP刻蚀技术的PLZST反铁电光子晶体制备方法，实验结果表明，光子晶体空气孔直径的平均值大约为426nm和504nm，近似于设计参数420nm和500nm，且圆孔形状规则，几乎无缺陷。完成项目计划研究内容后，课题组进一步研究基于微环谐振器耦合的Mach–Zehnder干涉仪中具有高斜率的可调式Fano谐振现象，以及基于硅绝缘体的带宽可调的微波光子滤波器和光电振荡器，结果表明，基于硅基高Q微环光电振荡器的温度传感器，当温度从28.92℃变化到30.01℃时，光电振荡器的输出频率从1.008GHz变化为11.984GHz，传感灵敏度为10.02GHz/℃，最大频偏为±1.73 MHz，对应的温度测量精度为±1.73×10-4°C。本项目研究为反铁电光子晶体在光通信、光互联、集成光电子器件等信息技术领域的应用奠定了基础。