Cu/Cr共掺杂类金刚石硬质薄膜的微结构设计与疏水机理

In order to meet the demand of functional features such as long-lasting anti-fouling, self-cleaning, anti-friction and anti-adhesion of metal materials, the development of diamond like films with good lubrication and mechanical properties, is a effective way of diamond like carbon films applicated in marine, biological medicine, MEMS and other fields. It becomes an international frontier in carbon-based materials research area. According to the previous theoretical calculation and preliminary experimental results of the applicant, the Cu/Cr co-doped diamond like carbon films can greatly reduce residual stress and retain high hardness. Meanwhile, the surface physical and chemical properties can be controlled with different bonding characteristics between Cu/Cr and carbon atoms. Therefore, this project presents a new design material of doping Cu/Cr metals into diamond like carbon films. A method combining ion beam and sputtering deposition technology will be used to realize the controllable deposition of hydrophobic films with high hardness, low residual stress and low friction. The influence of ration and component of Cu/Cr dopant on microstructure and wettability will be studied, aiming to gain the nano-particles of Cr-C hard phase with high hardness and Cu and Copper oxide phases with good friction and hydrophobicity by the synergistic effect of Cu and Cr metals. The film microstructure evolution process and the synergistic effect of Cu and Cr metals will be clarified. The relationship between component/structure, structure evolution and properties performance will be built, the hydrophobic mechanism of multiple-doped DLC films will be revealed. This work will provide important basis for developing diamond like carbon films with excellent mechanical and wettability properties in the hydrophobic/superhydrophobic applications.

针对金属表面对长效防污、自清洁、耐磨减阻、抗粘附等功能特性的需求，发展强韧润滑一体化的类金刚石疏水薄膜改性材料成为其应用于海洋、生物医药、微机电等领域的有效途径，是碳膜材料国际前沿课题。根据申请人前期理论和实验结果，在类金刚石薄膜中掺杂Cu/Cr双元金属，可在保持高硬度时大幅降低残余应力，且利用Cu/Cr与碳原子成键特征差异可调控其表面物化性质。因此，本项目设计了Cu/Cr共掺杂类金刚石薄膜的新材料体系，拟采用离子束复合磁控溅射技术，通过改变掺杂元素配比和含量，利用Cu/Cr的协同作用，调控纳米Cr-C和Cu及Cu氧化物形成相，实现高硬度、低应力、低摩擦的疏水类金刚石薄膜的可控制备。阐明Cu/Cr协同作用规律及薄膜微结构演变过程，建立薄膜的组分/结构调控-结构演变-性能之间的作用关系，揭示其疏水机理。对发展类金刚石硬质薄膜材料在疏水/超疏水领域的应用具有重要指导意义。

本项目针对海洋、生物医药、微机电等领域对疏水耐磨防护涂层材料的需求，聚焦铜铬共掺杂薄膜改性材料新体系，拟设计通过离子束复合磁控溅射沉积技术改变掺杂元素配比和含量，利用Cu/Cr的协同作用，调控纳米Cr-C和Cu及Cu氧化物形成相，实现高硬度、低应力、低摩擦的疏水类金刚石薄膜的可控制备。阐明Cu/Cr协同作用规律及薄膜微结构演变过程，建立薄膜的组分/结构调控-结构演变-性能之间的作用关系，揭示其疏水机理。通过项目实施，实现了Cu/Cr掺杂含量从0.3~27.0 at.%、Cu/Cr掺杂比例从0.76~2.15等不同组分薄膜的可控制备，阐明了Cu/Cr共掺杂类金刚石薄膜随组分变化的微结构演变过程，建立了薄膜组分调控-结构演变-性能之间的作用关系，设计获得了具有优异综合性能（疏水角~130°、摩擦系数~0.13）的疏水薄膜，并剖析了其疏水机理，主要是因为Cu/Cr协同作用促进了铜及铜的氧化物纳米颗粒的析出，形成了利于疏水的微-纳结构及低表面能的化学组分。进一步通过界面结构设计，在高速钢、不锈钢等基体表面获得厚度1.73 μm、膜基结合力>45 N、硬度27.1 GPa、应力1.0 GPa、摩擦系数0.1左右、磨损极小的Cu/Cr共掺杂类金刚石薄膜，最终探索了该薄膜在抱钳与丝杠产品上的初步应用。这将为实现耐磨类金刚石碳基薄膜材料在疏水环境下的应用奠定一定的基础。.本项目已发表学术论文4篇（SCI 3篇），申请发明专利5件，参加国内外会议交流8人次，邀请专家来访交流6人次，培养青年骨干和研究生5人。