大气等离子体超精密光学加工的多尺度去除机理及表面创成研究

Atmosphere plasma optical processing is a very promising manufacturing method for complex optical components with high efficiency and accuracy. This project aims to carry out multi-scale modelling research on the removal mechanism and surface morphology generation in atmosphere plasma optical processing. The formation and evolution of optical surface micro-morphology are studied in details in atmosphere plasma processing. The multi-physics modelling and simulation are adopted to analyze the influence of active atoms on the mesoscopic removal function and the generation mechanism of mid-spatial frequency features. The comprehensive form model in macroscale is built with non-linear factors and the corresponding process compensation method is proposed to achieve nanometre form accuracy in macroscale. In this work, the removal mechanism of atmosphere plasma optical processing is revealed from microscopic, mesoscopic and macroscopic perspectives, and a multi-scale coupled surface generation model is established. The research output aims to provide the necessary theoretical basis for the development of atmosphere plasma optical processing techniques, as well as strong technical support for high-end optical systems in major scientific projects such as large aperture telescopes, X-ray satellite instruments and inertial confinement fusion systems, which is of great significance.

大气等离子体超精密光学加工是针对复杂光学零件的新型高效高精度制造方法，十分具有前景。本项目开展大气等离子体超精密光学加工的多尺度去除机理及表面创成研究。系统深入地研究大气等离子体加工中光学表面微观形貌的形成和演变规律；利用多物理场仿真解析活性原子对介观去除函数的影响规律及中频特征创成机制；综合非线性因素建立宏观面形加工模型和提出工艺补偿方法。从微观、介观和宏观多个尺度揭示大气等离子体光学去除机理，建立多尺度耦合表面创成模型，为发展超精密大气等离子体光学制造提供必要的理论支撑，为我国的大口径天文望远镜、X射线卫星光学仪器、惯性约束核聚变等重大科学工程在尖端光学制造领域提供必要的技术支持，具有十分重要的意义。

大气等离子体超精密光学加工是针对复杂光学零件的新型高效高精度制造方法，十分具有前景。本项目开展了大气等离子体超精密光学加工的多尺度去除机理及表面创成研究。系统深入地研究大气等离子体加工中光学表面微观形貌的形成和演变规律；利用多物理场仿真解析活性原子对介观去除函数的影响规律及中频特征创成机制；综合非线性因素建立宏观面形加工模型和提出工艺补偿方法。从微观、介观和宏观多个尺度揭示大气等离子体光学去除机理，建立多尺度耦合表面创成模型，为发展超精密大气等离子体光学制造提供必要的理论支撑，为我国的大口径天文望远镜、X射线卫星光学仪器、惯性约束核聚变等重大科学工程在尖端光学制造领域提供必要的技术支持，具有十分重要的意义。