激光与微纳探针复合的多功能纳制造技术基础研究

Nano-manufacturing technology is one of the important techniques of nanotechnology. This project put laser into the near-field between micro-nanometer probe and the sample, using the interaction multi-field coupling effect between the laser and the micro-nanometer probe to fabricate the nanostructures, and operate nano-particles assembled into the machined nanostructures. This project combined the top-down and bottom-up nano-manufacturing technique to form the new nanostructures, nano-devices or nano-system. Combined with the basic theory of optics, quantum mechanics, micro-mechanics, electromagnetic, materials science, chemical and micro-nano science, the coupling effects of optics, thermal, force, electromagnetic, mechanical and others effects induced by the laser and the micro-nanometer probe is developed for nano-manufacturing in the near field space. The influence of different multi-field coupling effects with laser parameters, the micro-nanometer probe parameters and the interaction position of the laser and the probe are explored. The project give the analysis on the mechanism and the transformation law of enhanced laser effect on the material structure and the performance on the sample surface, and the mechanism of operating and assembling nano-particles into the nanostructures. The control strategies and implementation methods of different multi-field coupling effects for different nano-manufacturing processes are investigated. The project explained the manufacturing processing and the equipment principle for the all functions of nano-fabrication, nano-manipulation and nano-assembly achieved in one platform system. And this provides new manufacturing technology and application example for nano-manufacturing technology field.

纳米制造是当今科技发展的前沿研究领域，本项目将激光引入到微纳探针与样品作用的空间内，利用激光与微纳探针相互作用的多场耦合效应进行纳结构加工、操作纳米颗粒装配进入加工的纳结构，结合自上而下和自下而上的两种纳米制造实现手段，形成新型纳米结构、器件或系统。应用光学、量子力学、微观力学、电磁学、材料科学、化学和微纳米科学等基础理论，研究面向纳制造的近场空间内激光与微纳探针间的光-热-力-电磁-机械等多场耦合效应；探求探针与样品间激光增强效应对样品表面物质结构和性能的作用机理与转换规律；研究面向纳米加工、纳米操作、定位纳米装配的激光与微纳探针多场耦合不同效应的调控策略和实现方法；探索激光参数、微纳探针参数以及激光与微纳探针相互作用位置对多场耦合效应的影响规律；建立集纳加工、纳操作、纳装配功能于一体的激光与微纳探针耦合纳制造的工艺与装备原理，进行试验验证，为纳米制造技术领域提供新的制造技术基础。

随着纳米科学与技术的发展，新纳米材料及其卓越性能逐渐显示在高性能装备制造中广阔的应用前景，进行“纳－微－介观－宏观”跨尺度连接与封装，是纳米结构实现功能化、器件化和产品化的重要环节和关键技术。本项目以激光复合微纳探针产生的多物理场耦合效应为基础，结合自上而下和自下而上的两种纳米制造实现手段，重点研究激光复合微纳探针在近场空间内的电场增强效应，热效应等多种物理场的耦合效应；探求探针与样品间激光增强效应对样品表面物质结构和性能的作用机理与转换规律；以纳米钎料、碳纳米管为研究对象，研究纳米加工、纳米操作、定位纳米装配的激光与微纳探针多场耦合不同效应的调控策略和实现方法；探索激光参数、微纳探针参数以及激光与微纳探针相互作用位置对多场耦合效应的影响规律；基于多物理场耦合效应，研究纳米钎料熔化、碳纳米管互连等纳结构制造的工艺及相关机理，为下一代新型纳米器件及结构的制造及应用提供新的制造技术基础。