碳纳米管离子源与线性离子阱间的耦合机理分析及匹配性研究

Gas partial pressure measurement is widely used in many fields, such as space exploration, environmental pollution monitoring, vacuum measurement and so on. At present, there are still many shortcomings in the existing thermal emission ionization gas pressure gauge, and the technical bottleneck has been formed. The progress of gas partial pressure measurement technology needs to be applied to the new principle and new technology. Therefore, this project intends to use the carbon nanotube field emission ion source is applied to linear ion trap method, through the combination of theoretical simulation and experimental validation, the influence law of structure parameters and electrical parameters of the gas pressure calibration device system of carbon nanotubes ionization source and linear ion trap for gas pressure measurement performance, study on the coupling characteristics and matching mechanism of the new theory and method, the relationship between the initial establishment of gas pressure measurement performance and its related physical effects. The research results will be expected to meet the technical field of China field dynamic monitoring, deep space exploration and other high-tech partial pressure measurement on gas demand, has an important guiding role in the prospective gas pressure on the development of a new generation of low power consumption, fast response, no heat emission, miniaturization, suitable for on-site monitoring of the project, but also has an important significance for promoting the development of pressure measuring technology in China.

气体分压力测量在空间探测、环境污染监测、真空计量等技术领域应用广泛。目前，已有的热发射离子源气体分压力计依然存在诸多缺点且已形成技术瓶颈，气体分压力测量技术的进步还有待于新原理和新技术的应用。因此，本项目拟将碳纳米管场发射离子源应用于线性离子阱中，通过理论模拟和实验验证相结合的方法，利用气体分压力校准装置系统研究碳纳米管离子源以及线性离子阱的结构参数和电学参数对气体分压力测量性能的影响规律，研究其二者的耦合特性及匹配性机理，初步建立气体分压力测量性能和其相关物理效应之间关系的新理论和方法。研究成果将有望满足我国现场动态监测、深空探测等高新尖端技术领域对气体分压力测量的需求，对研制新一代低功耗、快速响应、无热发射、小型化、适合现场监测的气体分压力计有着重要的前瞻指导作用，同时对促进我国气体分压力测量技术的发展亦具有重要意义。

气体分压力测量在空间探测、环境污染监测、真空计量等领域应用广泛。目前，已有的热发射离子源依然存在诸多缺点。本项目针对传统热发射离子源存在的技术瓶颈，创新性地提出了基于碳纳米管离子源的线性离子阱质谱计的思想，并做出了如下贡献：.1.系统地研究了线性离子阱中离子运动特性及离子囚禁方式。详细阐述了磁场环境对离子阱中离子云形态的影响，找到了降低线性离子阱功耗以及提高其气体分压力测试灵敏度的有效方法。.2.研发了一种在不锈钢衬底上通过氧化-还原反应直接生长碳纳米管场致发射电极的方法，发射电流密度接近7mA/cm2，场增强因子达到1858。自主研制了一种真空系统内电极间距连续调节的场致发射性能测试装置，电极间距控制精度达到1.388μm。.3.研究了单磁极及双磁极碳纳米管离子源机械结构设计及样机研制，完成了两种碳纳米管离子源离子传输模拟以及光学聚焦系统设计。.4.研究了碳纳米管离子源与线性离子阱工作时序耦合机理以及其两者的电场叠加问题，完成了两者多电极模式下的工作匹配机制分析及实验研究，成功地实现了碳纳米管离子源线性离子阱对不同气体的分压力质谱测试及校准，对单一气体测试的灵敏度达到5×10-6A/Pa。.在本项目的执行过程中，授权国家发明专利3件，项目组成员获2020年甘肃省自然科学奖1项《基于碳纳米管阴极的超高真空测量技术》，项目负责人获2019年中国计量测试学会科学技术进步奖一等奖1项《材料真空性能测试技术研究》，共发表2篇中文期刊论文，13篇英文SCI期刊论文，参加了2次国内外学术会议，并在2019年瑞典举办的第21届国际真空大会上作了题为《A field emission performance test device for continuous adjustment of the electrode spacing in the vacuum system》的分会场交流报告。