面向航天高温、旋转环境的硅酸镓镧声表面波无线无源温/压/振多参数集成传感器基础研究

Aiming at meeting real-time and in-situ testing requirements of temperature-pressure-vibration in high temperature, high rotation and other harsh environments of aerospace vehicles and the internal space of their engines, this scheme proposed a new wireless passive sensor based on three-dimensional integrated surface acoustic wave principle and designed by the multi-parameter sensitive unit with lanthanum gallium silicate (LGS) piezoelectric materials and the antenna. The design of temperature-pressure-vibration surface acoustic wave sensor was optimized by the means of COMSOL finite element simulation software. By investigating the coupling mechanism between antenna and sensor, the signals of temperature-pressure-vibration at 1000 °C high temperature environment were wirelessly extracted. The micro-nano fabrication process of surface acoustic wave sensor was realized by studying the processes such as etching and bonding of LGS piezoelectric materials. The combined process of ion plating and screen printing was used to solve the thermal stress matching problem between metal materials and LGS wafers, which leads to the realization of the integrated manufacturing of the LGS multi-parameter surface acoustic wave sensor and antenna. By probing the crosstalk mechanism of surface acoustic wave multi-parameter sensor, the temperature compensation algorithm of surface acoustic wave sensor was explored to realize multi-parameter signal extraction in composite environment. Finally, a sensor-antenna integrated multi-parameter sensitive device was developed, which provides a measurement technology for multi-parameters extraction in harsh environments such as aerospace vehicles and the internal space of their engines.

针对航天飞行器及发动机内高温、高旋等恶劣环境下温度/压力/振动等参数的实时原位测试需求，本项目创新性的提出一种基于硅酸镓镧（LGS）压电材料的多参数敏感单元与天线一体化设计的三维集成式声表面波原理的无线无源传感器新结构。利用COMSOL有限元仿真软件完成温度/压力/振动多参数声表面波传感器的设计；通过研究天线与传感器的耦合机制，实现1000℃高温环境下的温度/压力/振动多参数信号无线提取。通过研究LGS压电材料刻蚀、键合等工艺参数，实现硅酸镓镧的微纳结构制造；采用离子镀膜与丝网印刷相结合的工艺，实现LGS多参数声表面波传感器与天线的集成一体化制造。通过深入研究声表面波多参数传感器的串扰耦合机制，构建声表面波传感器的温度补偿算法，实现恶劣环境下多参数的获取。最终研制出传感器与天线集成式一体化的多参数敏感器件，为航天飞行器及发动机等恶劣环境下多参数的测试提供测试方法。

高温、高压、高旋环境下复合参数的原位提取在航空航天领域具有重要的意义。本项目在技术层面，提出并突破了硅酸镓镧硬脆材料精准可控湿法刻蚀、高温热压键合、多层薄膜电极PLD镀膜技术等微结构制造工艺方法，设计并优化了微结构参数，解决了耐高温超薄敏感微腔结构成型制造技术，提升了器件耐温性能。在器件层面，建立了热/力多参数敏感元件与天线集成传感器件模型，揭示了高温下力学敏感转换机制，确定了多敏感元件合理布局、频率分离的设计规则，研制了温/压、温/振、温/应、温/压/湿四类传感器件，突破耐1000℃的压力参数测量。在应用层面，揭示了温度对压力、应变等参数高温下的测量影响规律，建立了高温实时原位同测的Δf-温度耦合因子解耦算法模型，研制了融合算法的解调系统样机。开展了器件结构集成封装研究，并交付航天一院2套传感器件与系统，配合进行某型号搭载实验，也推广拓展了传感器在某核工业、中煤集团等企业工程应用。项目组共发表了学术论文43篇，其中在《Scripta Materialia》、《Sensors and Actuators B: Chemical》、《Sensors and Actuators A: Physical》等期刊发表SCI论文34篇，邀请在《机械工程学报》特刊发表1篇；申请发明专利共24件，其中国内发明专利20件（授权5件），国际发明专利4件（授权1件）；参编Springer出版社出版的英文著作《Precision Manufacturing Precision Machine》一章节；参加学术会议12人次，其中Transducers 2021、IEEE MEMS 2021等国际会议poster/oral共6个，中国微米纳米技术学会第二十四届学术年会暨第十三届国际会议等会议邀请报告3次；举办国际会议1次。牵头制定了团体标准2项；相关成果获得了山西省技术发明一等奖、第48届日内瓦发明展金奖及中国产学研合作创新成果一等奖各1项。. 项目负责人入选国防青年基金、国家高层次人才计划青年项目、山西省委联系服务专家，并作为团队核心成员入选山西省科技领军创新团队、国防科技创新团队、科技部重点领域创新团队；项目组核心成员获省部级人才3人次；项目组培养博/硕研究生共24人，获国家奖学金4人、山西省优秀博士学位论文2人。