基于类金刚石碳基薄膜电极的阻性微井型探测器原型的研制

The Diamond-like Carbon (DLC) is a kind of low dimension foil material consists of sp2 and sp3 carbon atoms, it has good electrical performance, chemical stability, heat resistance and mechanical strength. Through specific process, The DLC can be used as the resistive electrode of the Micro-Pattern Gaseous Detectors (MPGDs). Compared with the widely used carbon-paste resistive electrode, The DLC resistive electrode has much better spark resistance, corrosion resistance, radiation hardness, and is able to endure lots of physical and chemical processing technic, which provides much convenience and plenty application prospects for new MPGD R&D..The Micro-Resistive WELL (μRWELL) detector is a new micro-pattern gaseous detector with resistive electrode. Compared with the traditional MPGDs, the μRWELL detector has not only excellent performance which are as well as the traditional MPGDs, but also the extra advantages. For example: low mass, thin thickness, fast and simple detector assembly. The μRWELL is one of the most potential MPGDs..Due to the lack of research on resistive DLC electrodes in the world, this project will focus on the resistive DLC electrodes and their applications in the μRWELL detector. We will study the influence of the preparation process parameters on the performance of the detector and the advantages and disadvantages of different resistive electrode configurations by means of the measurement of the μRWELL detector. The research on this project will be able to establish the foundation for the upcoming high intensity physics experiments and large scale applications in high rate environment.

阻性微井型 (Micro-Resistive WELL，μRWELL) 探测器是一种新型的阻性微结构气体探测器，不仅性能优异，而且具有物质量低，探测器厚度小，制作过程快速简单等优点，是最具有发展潜力的新型微结构气体探测器之一。阻性电极是μRWELL探测器的关键部件，而基于类金刚石碳基薄膜(Diamond-like Carbon，DLC)的阻性电极具有很强的抗打火，抗腐蚀，抗辐照能力，并且能承受很多物理，化学加工工艺，非常适用于μRWELL探测器。本项目研制基于DLC阻性电极的μRWELL探测器，研究DLC各种工艺参数对μRWELL探测器性能的影响，并探索不同构型DLC阻性电极在μRWELL探测器中的应用。本项目研究将为μRWELL探测器在未来高亮度物理实验和高计数率环境下的应用打下基础。

阻性微井型 (Micro-Resistive WELL，μRWELL) 探测器是一种新型的阻性微结构气体探测器，不仅性能优异，而且具有物质量低，探测器厚度小，制作过程快速简单等优点，是最具有发展潜力的新型微结构气体探测器之一。本项目在执行过程中对μRWELL探测器的电极构型，加工制作工艺进行了详细的研究和深入的探索，制作出了多个性能指标优异的μRWELL探测器原型。在对μRWELL探测器阻性电极的研究中，我们开创性的提出来将原本位于放大单元底部的快速接地结构转移至放大单元顶部的构想，并根据这一构想设计了全新的阻性电极加工方法(PEDF)。PEDF方法能够有效解决探测器加工过程中的对齐问题，因此能够为大面积μRWELL探测器的加工制造提供强有力的技术支持。目前，在PEDF方法基础上改进得到的PEP方法已经成为高计数率μRWELL探测器阻性电极制作使用的首选方法，同时也是米级μRWELL探测器中快速接地结构制作的唯一方法，对μRWELL探测器相关技术的发展具有非常重要意义。