基于纳米摩擦发电原理的穿戴式集成微能源器件的关键技术研究

One of the key issues of the rapid development of wearable electronics is exploring a reliable and sustainable power source. Based on the combination of electrification effect and electrostatic induction, an emerging ambient energy harvesting technology named triboelectric nanogenerators (TENGs) was developed, which can be employed to efficiently harvest the mechanical energy from our living environment and convert it to be electricity. Due to the flexible, high-output, sustainable and clean properties, TENG is considered as a promising approach to respond the power requirement of wearable electronic devices. However, the intrinsic characterizations of high impedance and high voltage make it very hard to deliver the electric energy to the power storage device, and result in the ultra-low efficiency of power transmission and utilization. This has become a critical limitation of TENGs’ practical applications in the wearable electronics field. Therefore, aiming at the specific domain of wearable applications, this project proposes a TENG-based single-chip-integration wearable directly-usable microenergy source. Three key technologies are proposed, including multi-stage power storage strategy, harvest-storage functional integration and soft-based micro/nano integration fabrication. The connection of flexible small-capacity and large-capacity power storage devices are proposed to realize the new multi-stage power storage strategy, which can significantly enlarge the efficiency of power transmission and storage of TENG. In addition, the functional integration of energy harvesting and power storage between TENG and power storage devices will be carried out to greatly simplify the whole device. Moreover, the soft-material based micro/nano integration fabrication technology will be introduced to manufacture the proposed device to realize the flexibility and miniaturization.

探索稳定可靠、可持续的合适能源供给方案，是目前快速发展的穿戴式电子设备所面临的关键核心问题之一。基于摩擦生电和静电感应原理相结合所实现的纳米摩擦发电机，能够有效地采集人体环境中的各种机械能，并高效地转换为电能，且具有柔性可穿戴、持续高输出、绿色无污染等优异特性，是解决上述难点的有效途径之一。然而，由于纳米摩擦发电机本身固有的高阻抗高电压的特点，其电能存储和利用效率低下，成为了其在面向穿戴式电子设备供能的实用化道路上的强大阻碍。针对穿戴式的特定应用场景，本项目基于多级能量存储、采集存储功能集成和柔性微纳集成加工，提出了一种基于纳米摩擦发电机的单片集成穿戴式柔性直供电微能源器件。“初级小容量+次级大容量”的多级储能机理创新可显著提高电能转移和存储效率，“能量采集+电能存储”的功能器件集成可极大地降低器件复杂度并提高集成度，“柔性微纳集成加工”技术的引入可实现器件微小型化柔性可穿戴的目标。

探索稳定可靠、可持续的合适能源供给方案，是目前快速发展的穿戴式电子设备所面临的关键核心问题之一。基于摩擦生电和静电感应原理相结合所实现的纳米摩擦发电机，能够有效地采集人体环境中的机械能并转化为电能，具有柔性可穿戴、持续高输出、绿色无污染等优异特性，是解决上述难点的有效途径之一。然而由于纳米摩擦发电机本身固有的高阻抗高电压的特点，其电能储存和利用效率低下，成为了其在面向穿戴式电子设备供能的实用化道路上的强大阻碍。为了解决纳米摩擦发电机能量传输与储存的问题，使其与穿戴式的特定应用场景相适应，本项目通过对电源管理电路拓扑结构的优化，实现了四种基于多级能量存储的电能高效传输与储能的方法，使电能转移效率提高了20%至70%。同时，实现了一种具有单向脉冲电能输出特性的对称梳状结构柔性纳米摩擦发电机，并与小容量储能元件结合，得到了“采能+储能”集成一体化器件，极大地降低了器件复杂度并提高集成度。最终，通过引入柔性微纳集成加工技术，结合多级能量存储、采集储存集成技术，制备了2种基于纳米摩擦发电机的单片集成穿戴式柔性直供电微能源器件，能够输出1.8 V、2.5 V、3.3 V、3.6 V，4种穿戴式电子设备的常用电压，为穿戴式电子设备提供了一种可靠、可持续的能源供给方案。