非对称双层金属光栅波导共振结构奇异光学透射机理与应用研究

As the extrem-high requirements to component miniaturization for micro-nanofabrication and photonic integration technology increasing quickly, sub-wavelength photonic devices based on surface plasmon polaritons have important applications in novel photonic-integrated systems because of their extraordinary optical properties. It is urgent to develop related theories, such as micro-and nano-optics and photonics, for component development and practical application. This subject will make an innovative investigation on symmetry-reduced dual-metallic gratings guided-mode resonant structure's extraordinary optical transmission mechanism, then make a study of parameters design and component development for dual-metallic gratings of special structure by integrating multiplentary theories and technologies which includes quantum optics, micro-and nano-optics, surface plasmon photonics, vector diffraction analysis, micro-optoelectro-mechanical system and nanolithography process. Based on the original physics mechanism of surface plasmon polaritons, we will focus on its novel theoritical analysis by integrating it with different sub-wavelength photon effects, such as coupling resonance effect of incident light with metal grating, guided-mode resonance effect in the dielectric layer, electric dipole and magnetic dipole resonance effect, the widespread Rayleigh anomaly, and Bragg effects. The goal of this research is to reveal extraordinary optical transmission mechanism of symmetry-reduced dual-metallic gratings guided-mode strcture, establish a universal operation mechanism of symmetry-reduced dual-metallic gratings guided-mode structure, develop new micro-nano fabrication technology by combine up-to-down bulk silicon process with metal surface process, and realize the component development of the subwavelength symmetry-reduced dual-metallic grating device. This project has significant scientific importance and potential application value for the development of next-generation photonics devices and their intergrations.

微纳加工和光子集成技术对元器件的小型化要求极高，亚波长光子器件以其超常规光学特性在新型光子系统中具有重要应用,目前急需发展相关的微纳光学和光子学理论，推进器件化与实际应用。本课题将量子光学、微纳光学、表面等离子激元光子学、矢量衍射分析、微光电微制造及纳米工艺进行有机融合，针对非对称双层金属光栅波导共振结构的奇异光学透射机理进行创新研究，并实施特种结构双层金属光栅的参数设计及器件化等研究。研究重点为以表面等离子激元理论为基础，将光在亚波长金属光栅中的耦合共振效应、介质层中的波导共振效应、电偶和磁偶激子共振效应、微纳光栅结构的瑞丽、布拉格反常等效应相结合，揭示非对称双层金属光栅波导结构奇异光学透射的物理机理，建立复杂结构亚波长金属光栅的工作机制，研究体硅与表面加工相结合的微纳制作流程与工艺，实现微纳结构非对称双层金属光栅的器件化。本课题研究对于研制下一代光子器件具有重要科学意义和应用价值。

本项目开展了对多种非对称双层金属光栅结构以及多种金属介质复合微纳结构的奇异光学现象机理与应用研究。将表面等离子激元光子学、矢量衍射分析法、微纳米制造工艺相结合，我们针对非对称双层金属光栅波导共振结构的奇异光学透射机理进行了深入研究，实施了对特种双层金属光栅结构的参数设计以及器件化研究工作，研制了多种光栅器件并将其用于生化检测，展示了新型亚波长光栅器件在微纳光学系统中重要的应用价值。通过研究非对称双层金属光栅结构中的单、双波长窄带滤波特性表明，结构中透射最小值的出现是偶极子模式与波导层导膜共振相互耦合作用的结果；设计了基于薄金属光栅结构的Fano共振折射率传感器，分析了结构在宽光谱范围的高折射率灵敏度与高品质因数的传感特性；基于对金属-介质-金属交替层结构异常透射现象的仿真模拟，揭示了上下双金属层间相互耦合作用下从紫外到近红外宽波段异常透射机制；通过对金属纳米棒膜、金属纳米盘膜阵列结构的光谱特性分析，发现其具备集高吸、强场增强、滤波以及高性能传感的多功用化特征，证明了纳米棒膜间强烈的磁偶极相互作用可致结构中最大的场局域增强效应达110倍，可实现单分子拉曼光谱探测；完成了几环孔阵列结构传感器的设计，实现了金纳米环阵列传感器的实验制备与测试；研究实现了具有高透射性能的金属-介质-金属堆叠结构带通滤波器，证明其同时具有高透射滤波与角度容忍度特性；通过对可见光范围内级联光栅的光学性能测试，建立了结构中明显透射峰出现的机制，为后续开发高性能光电器件提供平台；实现了金纳米盘阵列传感器微纳制备，利用多级布拉格模式的共振激发机制，并将其逐步应用于IgG生化分子检测。本项目的研究系统地建立了微纳光学金属类光栅波导结构工作机制，通过多种光栅器件的设计、研制和测试，加深了对表面等离子激元微纳光学器件模型构建、器件实现及功能应用方面的探索，对于推动微纳光学器件的研制及开发具有重要科学意义和应用价值。