痕量爆炸物快速检测的硅纳米线传感器研究

Explosive terrorist attack has been one of the major challenges in public security. Currently, although the trace analysis methods for TNT and DNT are with high sensitivity and selectivity, they face problems in practical applications due to high cost and difficulty in performing real-time detection. The proposal focuses on the high demand of micro biochemical sensors for dangerous explosive trace detection, consistent with the integration project which aims for effective monitoring and control explosive in public security. The proposal is an effective extension of previous research results of the major research plan “the basic research for nano manufacturing”. Based on the fabrication principle, method and technology of silicon nanowires, the fine control technology of silicon nanowires dimension will be developed, the molecule assembly technique of sensitive membrane (SAM, polymer, etc.) on silicon nanowire interface will be studied. The ‘dimension consistency’ and ‘biochemical consistency’ in silicon nanowires batch manufacturing will be obtained. A silicon nanowire FET prototype for high sensitivity, high selectivity and fast trace detection of TNT and other nitro explosive will be finally realized. Forming a unified whole with the integration project, this project will promote the application of nano sensors in the public safety monitoring like trace explosive detection and so on.

爆炸物恐怖袭击一直是公共安全面临的重大挑战之一。目前，TNT和DNT的痕量检测方法虽然灵敏性和选择性较高，然而在实际应用中仍面临检测费用昂贵，不易进行实时检测等问题。本项目将在“纳米制造的基础研究”重大研究计划前期成果的基础上，进一步围绕集成项目公共安全有效监测和防控中对危险爆炸物痕量检测微型生化传感器的需求，从硅纳米线的制造原理、方法和工艺出发，发展硅纳米线的尺寸精细控制技术，研究硅纳米线传感界面上分子敏感膜（SAM,聚合物等）的有序组装技术，解决硅纳米线批量制造的“尺寸一致性、生化一致性”问题，实现对TNT等硝基爆炸物高灵敏度、高选择性、快速痕量检测的硅纳米线FET原型样机，推动纳米传感器件在痕量爆炸物检测等公共安全监控中的应用，与集成项目形成有机的整体。

爆炸物恐怖袭击一直是世界范围内影响公共安全的重大问题。硅纳米线因为其纳米尺寸的高比表面积、高灵敏度及快速响应等特性，在小分子检测领域具有特殊的优势。本项目从纳米线的制作原理、方法和工艺出发，采用了SOI硅片腐蚀深度、腐蚀时间、晶相偏转角等控制工艺，初步实现了圆片内差异10纳米的精度控制，为硅纳米线尺寸一致性问题探索出一条有效途径。同时，通过接触角度和等离子轰击时间控制，基本实现了修饰芯片批间差异小于20%的重复性制备，初步解决了硅纳米线的生化一致性问题。本项目探索了五种分子敏感界面，其中三种分子界面可实现爆炸物的气态、液态同步检测，其中气体环境下实现1ppt浓度的TNT检出，液态环境下灵敏度都在fM水平。本项目开发的爆炸物传感器原理样机，可用于多种环境中硝基爆炸物的高灵敏检测，甚至在超酸性的环境中，都能实现硝基爆炸物的高灵敏重复性检出，为后续复杂现场的实际应用提供关键技术支撑，有效的推动了纳米传感器在公共安全领域中的应用。