基于电磁负刚度的精密隔振系统性能优化机理研究

Precision vibration isolation system is necessary for the generation of nano-precision in ultra-precision manufacturing and metrology equipment. Negative stiffness can reduce the natural frequency of the precision vibration isolation system, and broaden the bandwidth for effective isolation. Aims at the problems of negative stiffness, such as strong nonlinearity, fixed operating point and weak work stability，this project adopts the electromagnetic negative stiffness based precision vibration isolation system as the research object. Focused on two key scientific challenges: 1) the dynamic behavior optimization mechanism of vibration isolation based on dynamic stiffness design; 2) the rejection mechanism of unknown/time-varying multiple narrow band disturbance in ultra-low stiffness system, this project will carry out the systematic study covering the theories, methods, key technologies and experiments, propose the comprehensive evaluation and optimization method of nonlinear dynamic stiffness, explore the online optimization mechanism of dynamic stiffness based on the positive-negative stiffness matching criteria and propose the real-time and robust active suppression method of direct disturbance. The smooth implementation of this project is expected to bring breakthrough in the theoretical and technical perspectives of ultra-low frequency vibration isolation. Research achievements of this project will facilitate development of the key enabling components of ultra-precision equipment; enhance the performance of ultra-precision manufacturing, measuring equipment.

精密隔振系统是实现超精密装备稳定工作环境的根本保障。负刚度特性的引入能够大幅降低精密隔振系统的固有频率、扩展其隔振频带、提升低频隔振性能。针对目前负刚度存在的强非线性、工作点状态固定、加剧直接扰动影响等问题，本项目以基于电磁负刚度的精密隔振系统为研究对象，围绕基于动刚度设计的隔振系统动力学行为优化机理和近零刚度下未知、时变多窄带直接扰动抑制机制这两个关键问题，从理论、方法、关键技术和实验等层面开展系统深入的研究，提出系统工作点附近动刚度非线性的综合评价与优化方法，探索基于刚度匹配准则的工作点偏离下动刚度主动在线优化机制，提出具有高实时性、强鲁棒性的直接扰动的主动抑制方法，力争在超低频隔振的基础理论和关键技术上取得原创性突破，为我国高端制造、测量装备的关键共性支撑部件研发提供理论和基础技术支持，推动我国超精密制造、测量装备性能的进一步提升。

精密隔振系统是实现超精密装备稳定工作环境的根本保障。负刚度特性的引入能够大幅降 低精密隔振系统的固有频率、扩展其隔振频带、提升低频隔振性能。针对目前负刚度存在的强 非线性、工作点状态固定、加剧直接扰动影响等问题，本项目以基于电磁负刚度的精密隔振系 统为研究对象，围绕基于动刚度设计的隔振系统动力学行为优化机理和近零刚度下未知、时变 多窄带直接扰动抑制机制这两个关键问题，从理论、方法、关键技术和实验等层面开展了系统深入的研究，提出了系统工作点附近动刚度非线性的综合评价与优化方法，设计了基于刚度匹配准则 的工作点偏离下动刚度主动在线优化机制，提出了具有高实时性、强鲁棒性的直接扰动的主动抑制方法。发表SCI论文11篇，授权发明专利20项，获2018年中国机械工业科学技术一等奖，2019年国家技术发明二等奖。