可控磨粒织构金刚石固结工具高效抛光单晶蓝宝石曲面的基础研究

Owing to its excellent overall properties, sapphire single crystal continues to prevail in durable window/dome materials. But the low efficiency of fine surface polishing in its applications may exceed 80% of total cost. The project is focus on the mechanism and key technology for single crystal sapphire dome high efficient polishing. The research work includes design of the fixed orientation crystal diamond abrasive polishing tool, deposition of orientation crystal diamond film on the polishing insert, mechanism of sapphire material machining during polishing process using a fixed orientation crystal diamond abrasive polishing tool, high efficiency technology polishing a single crystal sapphire curved surface. The key technology in this project includes making a good property fixed orientation crystal diamond abrasive polishing tool, realizing the property multi-field control to deposit the texture diamond, promoting the efficiency of single crystal sapphire curved surfaces polishing, controlling the residual stress and damage on the polished sapphire surfaces. The design law of a fixed orientation crystal diamond abrasive polishing tool will be determined in the project. The rule relating to topography, texture, grain size of diamond crystal will be discovered. The chemical and mechanical reaction forming fine polished sapphire surfaces with fixed orientation crystal diamond abrasive polishing tools will be investigated. A high efficiency polishing technology for single crystal sapphire dome fine surface machining will be obtained in this project. The overall results will promote the technology of polishing hard and crisp material. It will also promote the fine surface machining technology of single crystal sapphire as a missile dome.

课题紧密围绕蓝宝石应用中所面临的迫切需要解决的关键问题，创新性地提出采用磨粒可控的织构金刚石固结抛光工具实现单晶蓝宝石曲面的高效抛光。项目拟通过可控磨粒织构金刚石固结抛光工具设计，织构金刚石磨粒的选择性生长，单晶蓝宝石可控磨粒金刚石抛光的材料去除机制，单晶蓝宝石曲面的高效抛光等方面的基础研究，解决可控磨粒织构金刚石固结抛光工具性能协调，晶粒可控织构金刚石制备的多元物理场构建，单晶蓝宝石曲面抛光增效，单晶蓝宝石抛光表面残余应力及损伤控制等方面的关键技术。解决单晶蓝宝石曲面加工的可控磨粒织构金刚石固结抛光工具的设计准则，金刚石磨粒的晶粒形态、生长取向、晶粒大小演变规律，可控磨粒织构金刚石抛光加工表面形成机制等方面的关键科学问题。形成单晶蓝宝石头罩高效抛光的新技术，提升我国硬脆材料的光整加工水平，为蓝宝石材料在国防装备中的应用提供技术支撑。

项目研究了磨粒可控的织构CVD金刚石抛光工具抛光单晶蓝宝石。在可控磨粒金刚石抛光工具设计、织构金刚石磨粒的选择性生长、单晶蓝宝石可控磨粒金刚石抛光的材料去除机制等方面开展了系统的研究。重点研究了可控磨粒金刚石抛光工具设计和制造，织构金刚石磨粒的选择性生长，金刚石织构、表面形貌、晶粒大小与磨粒切削性能的关系，单晶蓝宝石曲面抛光加工的材料去除机制，单晶蓝宝石与金刚石摩擦特性，单晶蓝宝石抛光加工。在CVD织构金刚石的晶粒形态控制、CVD金刚石涂层工具研磨蓝宝石的材料去除机理、单晶蓝宝石曲面抛光加工等方面获得了创新性成果。项目的研究成果将对光整加工用金刚石工具的基础研究、蓝宝石材料的高效精密加工技术研究都具有十分重要意义。在项目资助下培养了研究生12名，研究成果发表了学术论文28篇（刊登25篇、录用3篇），申请发明专利8项。项目达到了课题研究的预期目标，在人才培养方面也取得了良好的效果。