晶体硅新型高效PERL电池的连续流等离子体强化表面掺杂机理和方法研究

Traditional thermal diffusion doping method has serious “dead layer” which limits further improvement on the cell efficiency of Silicon-based solar cell. The structure and preparation techniques of PERL cell developed by the research group of UNSW are also too Traditional thermal diffusion doping method has serious “dead layer” which limits further improvement on the cell efficiency of Silicon-based solar cell. The structure and preparation techniques of PERL cell developed by the research group of UNSW are also too complex and cannot be further applied. In this project, we propose continuous flux plasma beam enhanced surface doping (CPD) method which can achieve high surface doping quality and high controllability, and propose new structure PERL cell with potential high efficiency preparation techniques. We will study on the mechanism of defect dynamics of the CPD method, the effect of the CPD doped junction on the PERL cell performance, the mechanism of the CPD doped heavy doped p type junction on the metal-Si ohmic contact. Based on the above mentioned research work, we will try to explore the best CPD technology and to build up a set of scientific research methods on CPD surface doping, PERL cell structure design and preparation techniques. The expected average efficiency of new cell on large area Cz p-Si substrates can exceed 22%, and the champion cell efficiency can exceed 23.5%.

传统的热扩散方法由于表面“死层”效应严重等缺点不利于晶体硅太阳能电池光电转换效率的进一步提升，而UNSW研究小组研制的PERL电池结构和制备技术也过于复杂从而难以实现大面积的应用。本课题组提出的连续流等离子体强化表面掺杂方法可以实现高可控高质量的表面掺杂、形成新型高效PERL电池结构和以及制备工艺。本项目将通过这种新型表面掺杂方法和新型PERL电池结构的两者紧密结合，研究①连续流等离子体强化表面掺杂的缺陷动力学、②基于这种掺杂方法实现的表面掺杂结对PERL电池性能的影响规律、③基于这种掺杂方法实现的PERL电池背面P型重掺杂结的金属-半导体欧姆接触机理。基于以上研究，建立一整套新型的高效PERL电池结构和制备工艺，在大面积直拉单晶的P型硅衬底上，可重复实现平均转换效率超过22%，最高转换效率超过23.5%的高效电池。

本项目以新南威尔士大学实验室研究的PERL电池为基础，将连续流等离子体强化表面掺杂方法应用于新型高效PERL电池制备，科学系统地研究探索这个新型表面掺杂机理和方法。结合电池正、背面的光学结构设计、表面钝化、金属化设计和优化，研究出一整套新型高效PERL电池技术方法。本项目将连续流等离子体强化表面掺杂方法和新型PERL电池结构两者紧密结合，研究了连续流等离子体强化表面掺杂的缺陷动力学以及基于这种掺杂方法实现的表面掺杂结对PERL电池性能的影响规律，并研究了基于这种掺杂方法实现的PERL电池背面P型重掺杂结的金属-半导体欧姆接触机理。基于以上研究，建立一整套新型的高效PERL电池结构和制备工艺，本工艺流程较实验室电池制作流程有较大程度的简化，同时可通过更可控更稳定的掺杂技术，实现更高效的电池性能，实现平均转化效率达22.5%，最高转化效率达23%以上。本课题培养硕士研究生5人，博士研究生2人；发表权威学术期刊、国际学术会议论文5篇以上；申请专利10项以上。