基于微腔放电耦合的等离子体晶体管导通机理及电学特性研究

Solid state transistor is the core component of driven system in aerospace detection equipment. However, thermal excitation or radiation excitation current will be generated in these devices when operated in high temperature, high radiation, or strong electromagnetic interference circumstances, resulting in the disorder of the working states, even physical damage to the transistors. The phenomenon brought in great risks to the application of transistors in aerospace in terms of stability and reliability. Microplasma has characteristics of large off-to-on resistance ratio, current density and high stability in harsh circumstances, and also has a common mathematical and physical properties with semiconductors. The study of the new transistor devices combined with microplasma and semiconductors is of great significance in the field of aerospace. The mechanism of microplasma coupling and turn-on principle of plasma transistor based on coupling manipulation is simulated by fluid and particle mixture model; the microplasma coupling mechanism is verified through experiments, and the regulation of microplasma physical properties is achieved through coupling parameters manipulation; the plasma transistor is fabricated and the electrical characteristics of the proposed device operated under high temperature, high radiation and strong electromagnetic interference circumstances is researched. The microcavity plasma coupling mechanism, physical property regulation mechanism and the electrical properties of microcavity plasma transistors under harsh conditions show important scientific significance for the research of new transistor devices and related application in aerospace.

固态晶体管器件是航空航天探测装置驱动系统的核心元件，但这类器件在高温高辐射、强电磁干扰下会产生热激发或辐射激发电流，导致工作状态紊乱，甚至损毁，对航空航天探测系统带来极大的隐患。微腔等离子体具有高开关电阻比、高电流密度、受高温高辐射和强电磁干扰影响小等特点，并且与半导体器件具有相似的数学和物理特性。研究微腔等离子体与半导体相结合的新型晶体管器件，对航空航天领域具有的重要意义。项目通过流体和粒子混合模型，研究微腔等离子体团相互作用机制及微腔等离子体耦合机理；在实验验证耦合机理的基础上，研究微腔放电耦合参数对微腔等离子体物理特性的调控机制；通过制备基于放电耦合的微腔等离子体晶体管器件，研究其在高温高辐射、强电磁干扰下的电学特性。研究获得的微腔等离子体耦合机理、物理特性调控机制，以及微腔等离子体晶体管在恶劣条件下的电学特性，对新型晶体管器件的研究及在航空航天领域的应用具有重要的科学意义。

微等离子体晶体管是新型开关器件中极具前途的候选者，它耐电离辐射及高温环境，可用于核电站、外太空探索等关键任务。然而目前已有的等离子体晶体管器件在结构设计，制备工艺，以及工作特性等方面仍然存在诸多问题，对器件的工作原理也缺乏解释，解决上述问题是微等离子体晶体管走向实际应用的关键。项目设计并搭建了全部参数可调，并且能够适应不同负载的双极性高压纳秒脉冲驱动系统，研究了脉冲参数对微腔等离子体放电特性的影响规律；建立了基于漂移扩散近似的二维流体模型和蒙特卡洛粒子模型，研究了纳秒脉冲驱动下微腔等离子体的耦合机理，通过实验研究了不同脉冲驱动参数对于微腔等离子体非线性传输特性及微腔气体放电电学、光学特性的影响规律；设计了微等离子体晶体管原型器件，获得了器件制备工艺及关键工艺参数，研究了电极材料、基底材料、器件结构及气氛条件参数对器件光电特性的影响规律及器件着火电压、放电电流随参数变化的规律；研究了器件栅极调控特性，实现了器件开关功能，研究了脉冲参数对开关特性的影响规律，获得了有效控制参数范围，分析了开关机理。本项目对诸如航空航天，地壳勘探等恶劣环境下的新型开关器件，电力电子系统领域的应用，具有重要的科学意义和应用价值。本项目还结合半导体加工工艺，初步探索了硅基微等离子体晶体管的制备工艺，对提升等离子体晶体管的集成化研究设计提供了参考。