大变形对无机可延展柔性半导体器件物理性能的调控机理研究

Inorganic stretchable semiconductor devices with stretchable elastomer substrate are used in wide applications because of their excellent performance in integrating multi-functional sensors and perfectly bonded to compliant skin of human body. When the devices are used with large deformations such as stretching, compressing, bending, twisting and so on, the energy band structure, optical properties of the system after deformation will change significantly. So the physical properties of semiconductor film can be controlled by the stretching for the inorganic stretchable semiconductor devices. At present, most studies on inorganic stretchable semiconductor devices lie at the stage of conceptual design, and there are only a few articles to depict this problem. The purpose of this proposal is to investigate the controlling of the stress distribution in inorganic semiconductor and thermal environment and optical properties of optoelectronic devices (such as micro-inorganic light emitting diode “μ-ILED”) by large deformation of the substrate. Furthermore, the energy band structures of semiconductors and wavelength of optoelectronic devices can be controlled. The results can benefit the design, guidance and applications of inorganic stretchable semiconductor devices with multi-functional integrations.

基于可拉伸弹性基体的无机可延展柔性半导体器件有着广泛的应用，这是由于其集成多功能传感器且可以完美贴合在人体柔软皮肤上。器件在服役过程中会受到拉伸、压缩、弯曲、扭转等各种状态的大变形载荷，变形后半导体器件能带结构、光学性能等都将发生变化，因此无机可延展柔性半导体器件可以通过基体大变形调控半导体器件物理性能变化。目前，国内外关于无机可延展半导体器件的研究还处于概念性设计阶段，在调控能带结构、光学性能变化方面的研究还不多。本项目研究基体大变形条件下无机半导体器件的应力、能带结构、光学器件（如微米级无机发光二极管即μ-ILED）热学环境、光学的调控作用，最终达到调控半导体能带结构、光电器件光学波长的目的。所得结果可以为多功能集成的可延展性半导体器件的设计和应用提供理论支撑与技术指导。

基于可拉伸弹性基体的无机可延展柔性半导体器件有着广泛的应用，这是由于其集成多功能传感器且可以完美贴合在人体柔软皮肤上。器件在服役过程中会受到拉伸、压缩、弯曲、扭转等各种状态的大变形载荷，变形后柔性电子器件能带结构、光学性能等都将发生变化，因此无机可延展柔性半导体器件可以通过基体大变形调控半导体器件物理性能变化。本项目研究基体大变形条件下无机半导体器件的应力、能带结构、光学器件热学环境、光学的调控作用。所得结果可以为多功能集成的可延展性半导体器件的设计和应用提供理论支撑与技术指导。