基于AlMn合金TES器件的X射线探测器研究

Transition-edge detector (TES) has excellent energy resolution reaching 1.6 eV@5.9kev. It can clearly distinguish the spectral lines of carbon, oxygen and others elements, giving it a powerful ability to search for the dark baryon. It also can be applied to material structure analysis, element fine structure research, etc. Its broad application prospect makes it one of the most important research objects in the X-ray detection..Developed countries in Europe, America and Japan are all developing TES detector technology, which is walking out of the lab. Meanwhile, space science satellites ATHENA and Super DIOS basing on TES detector are proposed. In China, the TES technology is beginning to be studied in the laboratory. Now the HUBS project proposed by the tsinghua university is actively push forward the domestic TES technology..Based on the domestic development needs, in this study, AlMn alloy film widely used in millimeter band is selected in an exploratory way as the core component of TES detectors. The application characteristics of the AlMn alloy film will be studied in X-ray band, and a single-pixel X-ray detector based on the AlMn alloy TES device will be developed..Main research contents include:.(1) Studying the characteristics of AlMn alloy film.(2) Comparing three different connection modes between AlMn alloy film and absorber.(3) Physical Simulation of TES devices based on Comsol software.(4) Exploring the TES device fabrication technology and producing a one-pixel TES device..(5) Studying the test method and making a calibration for the TES device..Expected research results and significances:.(1) The relation between physical characteristics and fabrication condition of AlMn alloy film will be obtained. The results will be an important supplement to the existing knowledge of AlMn alloy film..(2) The physical properties of AlMn alloy films with three different connection modes will be tested. By analyzing the differences, it can be determined whether the characteristics of AlMn alloy films can be affected by the proximity effect and to what extent. Those will be helpful to understand the superconductivity of AlMn alloy film..(3) A single-pixel AlMn alloy TES detector will be developed and its comprehensive performance will be tested. The later can be used to evaluate the application potential of AlMn alloy TES detector in X-ray band..(4) The fabrication technology and test method of TES devices will be mastered, which lays a foundation for the production of TES devices with higher performance..This project will produce 1-2 scientific papers to report research results. The design, fabrication process and calibration test results will be recorded in the research summary report in details.

超导转变边沿探测器（TES）具有极优的能量分辨率，在X射线波段达到1.6eV@5.9keV，可以清晰分辨碳、氧等元素谱线，有望解决当前宇宙学最热门的重子丢失疑难，并可应用于材料结构分析、元素精细结构研究等，具有广阔的应用前景，已成为X射线探测器中最重要研究对象之一。.欧美发达国家以及日本均在大力发展TES探测器技术，已进入实用阶段，并提出了以TES探测器为核心的空间科学卫星ATHENA和Super DIOS项目。国内才刚开始研究，但清华大学提出的HUBS空间项目也积极地推动着国内TES探测器技术的向前发展。.本课题从国内发展需求出发，探索性的选取了在毫米波段广泛使用的AlMn合金膜为TES探测器核心部件，研究AlMn合金膜在X射线波段应用的特性，并研制一个单像素的、基于AlMn合金TES器件的X射线探测器。.主要研究内容包括：.（1）测试AlMn合金膜特性.（2）比较AlMn合金膜与吸收体的三种连接方式.（3）开展基于Comsol软件的TES器件物理仿真.（4）摸索TES器件制备工艺，制备TES器件.（5）确定TES器件测试方法，标定TES器件.预期研究成果及意义：.（1）将掌握AlMn合金膜物理特性与制备工艺的关系。该结果具有重要参考价值，是对现有结果的重要补充。.（2）将获取三种不同连接方式下AlMn合金膜物理特性。通过分析三者的差异，可确定AlMn合金膜特性是否会受到邻近效应的影响及其程度。这对于理解AlMn合金膜超导特性具有促进作用。.（3）研制出单像素的AlMn合金TES探测器，并获取该探测器的综合性能。这有助于评估AlMn合金TES探测器在X射线波段的发展潜力。.（4）全面掌握TES器件的制备工艺及其测试方法，将为后续开展高性能TES器件的研究做好铺垫。.本项目将发表1-2篇科学论文，报道研究成果。TES器件设计、制备及标定测试等重要内容将汇总在研制总结报告内。

TES探测器具有极高的能量分辨率，是继半导体探测器之后的新一代量能器，具有广阔的应用空间。针对现在以双层膜TES为主体的发展现状，本项目提出AlMn合金膜TES在X射线探测器中具有巨大潜力，并以探索性的方式来研究基于AlMn合金TES的X射线探测器，包括AlMn合金薄膜特性、制备工艺、以及探测器标定等。经过3年研究，我们详细测试了厚度240nm的AlMn合金薄膜R-T曲线，以及烘烤对其影响。基于烘烤方法，实现了超导转变温度Tc在100-400mK内的自由调节，该结果已在中国物理B杂志上发表。其次，摸索出完整的TES探测器制备工艺，并研制了6×6阵列的AlMn合金TES的X射线探测器。最后，基于制冷系统和DC-SQUID放大器，利用Fe-55放射性核素对探测器进行了标定测试，得到TES探测器（单像素）能量分辨率为106eV@5.9keV，优于性能最好的半导体探测器，表明AlMn合金TES适用于X射线探测器。.AlMn合金薄膜Tc的热烘调节方式，比双层膜的厚度比调节方式更加快捷、简单，且AlMn合金有相对简单的工艺和更强的抗磁场干扰能力，（若在后续优化中能达到与双层膜TES探测器相同的性能）AlMn合金膜将可成为一个重要的发展方向，甚至替代双层膜。基于AlMn合金TES的X射线探测器将在空间X射线天文、束线站同步辐射光源、国防安检、核检测等领域具有潜在的应用。.