硅基片上布里渊激光振荡的新机理新技术研究

Silicon-based optoelectronic integrated chips have wide applications in the areas of microwave photonics and optical interconnect. Moreover, silicon-based laser sources, compatible with the CMOS technology, have become the current research hot spot and hard point. This project will investigate the novel mechanism and techniques of Brillouin laser oscillation on silicon-based chip with micro-nano structures. We will study the novel mechanism of Brillouin laser oscillation in silicon-based acoustic-optical hybrid waveguide resonator under the effect of optical forces to analyze the influences of transmission characteristics of acoustic wave and optical fields on the laser oscillation properties, and hence to scheme out silicon-based integrated and CMOS compatible laser sources. We will research into the hybrid waveguide with the combination of SiO2 phononic crystal waveguide and Si3N4 optical waveguide to independently regulate dispersion curves of optical waveguide and phononic crystal waveguide, to suppress the leakage of acoustic fields, to improve the common confinement to acoustic wave and optical fields, and to enhance the stimulated Brillouin scattering effect. To reveal the evolution discipline of Brillouin laser oscillation in silicon-based micro-nano structure resonator, the racetrack-liked micro-ring resonator based on acoustic-optical hybrid waveguide is investigated. We will also study the manipulation mechanism of Brillouin laser oscillation in silicon-based acoustic-optical hybrid waveguide resonator to achieve flexible and controllable Brillouin laser. We will investigate the fabrication techniques of acoustic-optical hybrid waveguide resonator and fabricate the silicon-based chip Brillouin laser. This research will provide an effective approach to implement silicon-based laser sources.

硅基光电子集成芯片在微波光子学、光互连等领域有着广阔的应用前景，而与CMOS工艺相兼容的硅基激光光源已成为当前研究的热点与难点。本项目拟对微纳结构的硅基片上布里渊激光振荡的新机理新技术展开研究。研究在光力影响下硅基声光复合波导谐振腔布里渊激光振荡的新机理，分析声场、光场的传输特性对激光振荡性能的影响，设计出可硅基集成且与CMOS工艺相兼容的激光光源。研究SiO2声子晶体波导和Si3N4光波导相结合的复合波导，实现对声子晶体波导和光波导色散曲线的独立调控，抑制声场的泄漏，完善对声场和光场的共同束缚，增强受激布里渊散射效应。研究基于声光复合波导的跑道型微环谐振腔，揭示硅基微纳结构谐振腔中布里渊激光振荡的演变规律。研究硅基声光复合波导谐振腔布里渊激光振荡的调控机制，实现灵活可调的布里渊激光器。研究声光复合波导谐振腔的制备工艺，并制备出硅基片上布里渊激光器，为实现硅基激光光源提供一条有效的途经。

硅基集成光电子芯片在数据中心、超级计算机和物联网等领域有着广阔的应用前景。与CMOS工艺相兼容的硅基激光光源的研究有着重要的学术意义和实际应用价值，并对硅基光电子集成芯片的发展有着重要的推动作用。本项目围绕硅基片上布里渊激光振荡的新机理新技术展开研究，实现了硅基片上的受激布里渊散射并观测到了硅基片上布里渊激光振荡。提出并设计了一种脊形波导和声子晶体平板相结合的声光复合波导结构，该结构能同时限制光学与声学模场，并能独立地调控光场与声场的色散特性。利用CMOS兼容的工艺制作了该结构的直波导器件，实现了受激布里渊散射并测得了0.9dB的布里渊增益。本项目还设计与制作了基于声光复合波导的硅悬空跑道型和螺旋型微环结构。实验论证了两种微环中谐振增强的前向SBS效应，测得的布里渊频移为4.27 GHz。利用研制的基于混合光声波导的硅悬空跑道型微环结构，在外界掺铒光纤放大器的辅助下，实现了前向级联的布里渊激光振荡。设计并制作了级联悬空跑道微环用于增强硅基片上前向SBS效应，实现了3.0 dB和2.4 dB的anti-Stokes和Stokes放大。研究了受激布里渊散射在微波频率测量中应用，实现了测量范围宽、误差小的微波频率测量。通过本项目对硅基片上受激布里渊散射和布里渊激光振荡的研究，为实现硅基片上激光光源、光学隔离等提供了一条有效的途径。