低温射频等离子体对异质纳米复合材料表面改性及其气敏特性研究

Cold radio-frequency (RF) plasma can produce chemical groups with high activity. The structure and the surface properties of materials can be changed by cold RF plasma, when it is applied to the surface modification of materials. In this project, cold RF plasma technology is used for surface modification of the prepared heterogeneous nanocomposite . In this reaction, the surface activity of the heterogeneous nanocomposite will be excited; the surface area and oxygen content of the materials can also be increased. Then, the process between the plasma and the surface of the heterogeneous materials will be calculated and emulated based on first principles, and molecular dynamics model of the interaction process will be established. According to the results of characterization, the reaction mechanism of the cold RF plasma and the material surface can be analyzed. The adsorption process of modified heterogeneous nanocomposite to VOC gas is emulated based on the first principles, and the adsorption mechanism will be studied according to the calculation and gas sensitive measurement. Applying plasma modification technology to the preparation of heterogeneous nanocomposite gas sensitive materials, the aim will be realized, which will reduced the working temperature, enhancing the response sensitivity and long-term stability, and improving the practicability of the semiconductor gas sensors.

摘要：低温射频等离子体可以产生具有高活性能的化学活性基团，将其应用于材料的表面改性处理，可改变材料的结构和表面特性。本项目拟采用低温射频等离子体技术对所制备的异质纳米复合纤维材料进行表面改性处理；激发异质复合材料表面活性，增大材料的表面积和含氧量；基于第一性原理对等离子体与材料表面作用过程进行计算和模拟、仿真，建立等离子体与异质材料表面作用过程的分子动力学模型，结合表征分析得到低温射频等离子体与材料表面作用机理。利用第一性原理模拟改性后材料对VOC气体的吸附过程，研究改性后材料的气体吸附机理。旨在通过等离子改性技术降低异质纳米气敏材料的工作温度，提高响应灵敏度和长期稳定性等，改善材料的气敏特性，提高半导体气体传感器的的实用性。

摘要：本项目设计开发了同轴静电纺丝装置，并采用同轴静电纺丝法和静电纺丝低温水浴法制备了的异质纳米复合纤维材料SnO2/In2O3和SnO2/ZnO气敏材料，并采用低温射频氧等离子体进行了材料表面改性处理，激发了异质复合材料表面活性，增大材料的表面积和含氧量；为了深入了解不同种低温射频等离子体和对不同放电功率，不同放电条件下等离子改性差异，分别对SnO2,In2O3,ZnO,NiO等金属氧化物纳米纤维用N2,O2和H2三种载气的等离子体在不同的放电功率，不同的偏压条件下进行等离子体表面改性处理工艺的研究。其形貌、结构、氧含量，气敏特性和响应机理进行了详细的分析和研究。通过基于第一性原理对等离子体与材料表面作用过程进行计算和模拟、仿真，建立等离子体与异质材料表面作用过程的分子动力学模型，结合表征分析得到低温射频等离子体与材料表面作用机理。得到通过等离子改性技术提高金属氧化物纳米纤维气敏性能改善的原因，提高半导体气体传感器的实用性。