基于静态膨胀法真空基础标准的极小气体流量测量及应用研究

Very low gas flow measurements is an important issue in several fields, such as space exploration and vacuum metrology. At present,the measurement lower limit of very low gas flow is 1E-12Pa.m3/s, which can not meet practical requirements. In this project,A new measurement method of very low gas flow is introduced, which based on static expansion vacuum primary standard.The project deals with measurement and theoretical validation of laser orifice conductance, the measurement for vacuum volume ratio, the modeling and design of measurement system of very low gas flows, simulation the distribution of gas in the system, and application experimentation validation of very low gas flow. The problem on measurement of very low gas flow less than 1E-12Pa.m3/s is hopeful to be solved. This study has the meaning for accelerating the development of vacuum metrology.

极小气体流量测量在空间探测、真空计量等领域应用广泛。目前，极小气体流量的精确测量下限为1E-12Pa.m3/s，不能满足实际应用需求。本项目中提出了基于静态膨胀法真空基础标准的极小气体流量测量方法，通过开展激光小孔流导的测量与理论验证、复杂结构真空容器容积比测量、极小气体流量测量系统的建模与优化设计、气体流场模拟分布以及极小气体流量测量的应用实验验证等基础理论研究，有望解决小于1E-12Pa.m3/s量级极小气体流量测量难题。研究成果对于促进我国真空计量基础科学的发展具有重要意义。

极小气体流量测量在空间探测、真空计量等领域应用广泛。目前，极小气体流量的精确测量下限为1E-12Pa·m3/s，不能满足实际应用需求。本项目中提出了基于静态膨胀法真空基础标准的极小气体流量测量方法，通过开展激光小孔流导的测量与理论验证、复杂结构真空容器容积比测量、极小气体流量测量系统的建模与优化设计以及极小气体流量测量的应用实验验证等基础理论与实验研究，最终实现了10-14Pa·m3/s极小气体流量的测量。这一成果解决了极小气体流量测量难题，对促进我国真空计量基础科学的发展具有重要意义。