压电-摩擦电复合式宽频带微型振动能量收集器机理与关键技术研究

The project aims at the scientific and key technical problems which exist in micro energy harvester how to efficiently access and convert ambient kinetic energy into electrical energy and work in broadband frequency. Applicants are on the basis of long-term study of micro energy harvesting technique. Using the MEMS/NEMS technique, the novel structure, ideas and methods of broadband and high power output hybrid micro vibration energy harvester based on piezo and triboelectric effect which consists of piezoelectric cantilever beam arrays and flexible PDMS film structure has been innovative proposed. The project will break through multi-physics field coupling mechanism of ambient kinetic energy-piezo-tribo- electric, to realize the wide-band and efficient acquisition and conversion of the ambient kinetic energy, to break through the mechanism and method of frequency band widening, to break through and realize the fabrication and pattern technique of high-performance PZT film, PDMS film and 3D micro-structure integration compatibility processing. Then the principle prototype of broadband and high power output hybrid micro vibration energy harvester based on piezo and triboelectric effect was designed and fabricated, and the corresponding basic principle, theoretical system of design method and technology series of integrated manufacturing were formed. It is very important to provide significance theoretical and technical support for the practical application of the micro ambient vibration energy harvester.

项目针对微型能量收集器存在的如何高效获取与高效转换环境动能为电能、又能宽频带工作等科学与关键技术问题，在申请者长期研究微型能量收集技术基础上，基于MEMS/NEMS技术，创新性的提出宽频带工作和高功率输出的共质量块压电悬臂梁阵列和上下带柔性PDMS薄膜结构构成的压电-摩擦电复合式宽频带微型振动能量收集器新结构、新思想与新方法。项目将突破环境动能-压电-摩擦电的多物理场耦合机理，实现微型振动能量收集器对环境动能的高效获取与高效转换；突破频带拓展的机理与方法，实现对环境动能的宽频带获取与转换；突破高性能PZT薄膜和柔性PDMS薄膜的制备与图形化、三维微结构集成兼容加工等关键加工技术，研制出宽频带工作、高功率输出的压电-摩擦电复合式宽频带微型振动能量收集器原理样机；形成相应基本原理、设计方法的理论体系和集成制造技术系列。为实现面向环境动能的微型振动能量收集器的实用化，提供重要的理论和技术支撑。

长寿命、高能量密度、宽频带工作的微型环境动能能量收集器技术是典型的军民两用技术，微型环境动能能量收集器在智能制造、无线传感器网络、无人值守网络、信息化装备等领域需求迫切。. 项目针对微型环境动能能量收集器高效获取与转换环境动能为电能、宽带工作等科学与关键技术问题，系统地开展了压电-摩擦电复合式宽频带微型振动能量收集器的基础理论与关键技术研究。提出了几种复合式宽频带微型振动能量收集器新结构，建立了环境动能-压电-摩擦电的多物理场耦合与频带拓展的理论模型，实现了环境动能的高效获取与高效转换和频带拓展；突破了多层复合功能薄膜的制备与三维微加工等关键技术，研制出了压电-摩擦电复合式宽频带微型振动能量收集器原理样机；形成了复合宽频带微型动能能量收集器设计理论与方法的理论体系和制造技术系列，取得了重要创新性成果。.（1）提出了压电-摩擦电复合宽频带微型振动能量收集器新结构,建立了机电耦合等效集总参数和频带拓展理论模型； .（2）提出了压电-电磁-摩擦电复合宽频带微型振动能量收集器新结构，突破了复合功能薄膜的制备等工艺，实现了器件的低频、宽带和低加速度工作，提升了输出功率，拓展了频带宽度；.（3）基于多模阵列和限幅拓频法，提出了基于梯形压电悬臂梁阵列的微型宽频带压电振动能量收集器新结构，建立并求解了非等截面压电悬臂梁单自由度双向耦合集总参数模型和双向耦合分布参数模型；.（4）突破了多层复合功能薄膜的制备与三维微加工等关键技术，成功研制出复合宽频带压电振动能量收集器原理样机；.（5）探索了基于颤振机理的双端固定梁电磁风致振动能量收集器的流固耦合的理论，建立了双端固定梁电磁振动能量收集器的机电耦合理论模型。. 获授权发明专利2项，在Nano Energy等重要期刊发表SCI论文5篇,参著专著1部；培养博士2人，硕士2人；承办国际会议1次，参加国内外学术交流20余人次，开展了卓有成效的国内外合作与交流。