抑制超精密运动平台微振动的低频宽带隙周期性结构研究

The ultra-precision motion platform (UPMP) is the core component of the nano-manufacturing equipment, such as IC manufacturing, microscopic machining, precision measurement. Obviously, suppressing micro-vibration of the UPMP is an important and urgency problem needs to be studied. The micro-vibration has some characteristics as small amplitude, broad band, and low frequency. It is hot and difficult issues of current international research forefront to suppress this kind of micro-vibration. The project will establish periodic structure theory model with multiple material composite, multiple arrangement, and including the nonlinear local resonance unit. The coupling between the nonlinear local resonance unit and period structure will be studied to the impact law on characteristics of band gap which is acted by the behaves of nonlinear vibration as sub-harmonic, ultra-harmonic, internal resonance and bifurcation, etc. Further to clarify the influence mechanism of system parameters, such as material, structure, control and nonlinear, on the damping performance including the band gap width, frequency and vibration attenuation rate. The multi-parameter optimization method of the periodic structure will be proposed. The key dynamics problem in design and application of damping system will be solved. All those will lay the foundation for developing a periodic structure system with some advantages of small size, broad band gap, low frequency, high vibration attenuation rate and good stability. To carry out such a study can further promote the interdisciplinary cross-penetration.

超精密运动平台是大规模集成电路制造、精微加工、精密测量等纳米制造装备的核心部件，开展超精密运动平台微振动抑制研究的重要性和紧迫性不言而喻。其微振动振幅小、频带宽、频率低，这类微振动的抑制是当前国际前沿的热点难点问题。本项目将建立研究多组元、多排列、含非线性局域共振单元的周期性结构理论模型，研究非线性局域共振单元与周期性结构之间的耦合作用，揭示亚谐波、超谐波、内共振和分岔等非线性振动行为对带隙特征的影响规律，阐明材料、结构、控制和非线性等系统参数对带隙宽度、频率和振动衰减率等减振性能的影响机制，提出周期性结构多参数优化方法，从而解决减振系统设计与应用中的关键性动力学问题，为研制体积小、带隙宽、频率低、振动衰减率高、稳定性好的周期性结构系统奠定基础。开展这样的研究，还可以进一步地促进学科的交叉与渗透。

周期性结构因具有频率带隙，可用于隔离超精密运动平台的微振动。面向抑制超精密运动平台微振动的低频且频率范围大等特点，周期性结构应克服带隙频率高，带隙窄，尺寸大，衰减率低，承载力小等瓶颈问题。本项目在低频宽带隙周期性结构理论、计算方法、非线性、带隙耦合等领域，取得了一系列重要成果。发表论文18篇，其中SCI论文9篇，EI论文14篇；授权国家发明专利2项；8人次在国际学术会议上作学术报告；获得SPAWDA2016学生竞赛优秀论文奖；培养博士3名，硕士5名。.本项目提出了低频宽带隙三明治腔型周期性结构的理论模型，阐明了弯曲刚度的刚柔周期排列是低频、宽带隙、高衰减率带隙主要形成机理；提出了压电弹簧低频换能结构，共振频率可达3.8Hz；提出了压电结构精确电场计算方法，克服均匀电场法无法正确计算弯曲振动转换能量的弊端，为压电周期性结构研究奠定了理论基础；提出了增强型平面波展开法，解决了带共振电路多维压电周期性结构的求解难题；建立了折叠梁型压电周期性结构理论模型，得到了结构和电路参数对带隙特征的影响规律，通过电路参数的优化，得到了369-4000Hz的带隙；建立了等频和等电感两种共振电路的圆板型压电周期性结构理论模型，提出了半解析半数值的计算方法，研究了模型参数对带隙结构的影响，得到了局域共振低频带隙，振动衰减率从22dB提高到42dB。建立了非线性压电换能理论模型，阐明了模型参数对换能结构多值现象的影响，提出了两种拓宽压电换能结构的工作频带的方法：通过优化设计拓宽左边单值区频率；通过电压源激励适当的初始条件。压电换能结构的工作频带从左单值区拓宽到整个多值区。进一步建立了非线性周期性结构模型，阐明了非线性参数对带隙的调节机制。建立了周期性压电圆管结构理论模型，阐明了电路谐振的局域共振带隙和布拉格带隙之间相互耦合作用规律。建立了微尺度压电换能的非局部弹性理论模型，为压电周期性结构微型化设计提供了理论指导。