基于实时数字图像处理的同步辐射X射线微探针自动化技术研究

By utilizing micron / submicron X-ray microbeam, combining with a variety of experimental methods, including scanning microbeam X-ray fluorescence imaging, microbeam X-ray diffraction and microbeam X-ray absorption spectrum, synchrotron radiation X-ray microprobe can make high spatial resolution and high sensitive detection to the composition, structure and distribution of materials, which is the important methodology to study leading edge scientific research on a wide range of areas, such as Biology, Environment and Materials. At present, to analyze the samples by means of synchrotron radiation X-ray microprobe, users are required to take complex operations on multiple user interfaces, including put the sample to the beam in micron / submicron scale, a variety of detectors, the sample stages and the microscopic parameter setting and switching. All of these operations require users to have in-depth understanding about experimental methods and devices of synchrotron radiation X-ray microprobe, which limited its experimental efficiency and popularity. Based on hard X-ray microfocus beamline station in SSRF, combined with real time digital image processing technology and EPICS based data acquisition and control technology, this project will focus on study about automation technology of hard X-ray microprobe so that we can implement high automation for experiment of X-ray microprobe. As a result, just few simple operations will be needed on a single user interface to complete multiple experiments.

同步辐射X射线微探针利用微米/亚微米X射线微束，结合扫描微束X射线荧光成像、微束X射线衍射和微束X射线吸收谱等多种实验方法，可以对物质成分、结构及其分布进行高空间分辨、高灵敏的探测，是生物、环境和材料等广泛领域开展前沿科学研究的强有力手段。目前，利用同步辐射X射线微探针对样品进行综合的分析实验需要用户在多个操作界面进行复杂的操作，包括：微米/亚微米精度的样品对光，多种探测器、样品台和显微镜的参数设定和切换等，要求用户对同步辐射X射线微探针实验方法和装置有比较深入的了解，限制了同步辐射X射线微探针的实验效率和推广应用。本项目将在上海光源硬X射线微聚焦光束线站的基础上，开展硬X射线微探针自动化技术研究，结合实时数字图像处理技术和基于EPICS的控制和数据采集技术，实现X射线微探针实验的高度自动化，只需用鼠标在单个用户界面进行少量的操作既可完成对样品进行的多种实验方法.

本项目在上海光源硬X射线微聚焦光束线站，开展硬X射线微探针自动化技术研究，开发了基于数字CCD的实时图像处理的两维定位技术，建立了样品的数字坐标系统，开发了多轴样品台的任意空间位置快速定位和扫描技术，从而实现了同步辐射微探针自动化样品对准和扫描。用户只需用鼠标在样品实时图像上任意位置点击，该点能够自动对准聚焦光斑，精度达到1μm；用户使用鼠标在样品实时图像圈定任意形状，系统能够实现自动化扫描，简化了复杂操作流程，大大提高了实验效率和用户体验。本项目的工作完成情况如下：1) 完成了高精度样品架的设计与加工，能够对不同尺度样品进行实验。2) 完成了数字CCD选型，并开发了基于EPICS平台的实时数字图像处理软件，能够实现高速实时图像显示和数据处理。3) 结合探测器建立了样品自动对准方法，通过点击鼠标即可实现样品点的自动对准。4) 实现了由显微镜主导的自动化扫描方法，使用鼠标在图像上圈出感兴趣区即可对该区域进行自动化扫描。5) 已发表封面论文一篇，并且有三篇在投；已授权专利两项。6) 培养了研究生一名。