极大口径拼接镜面望远镜差动调频式电感位移传感器的关键技术研究

The segmented mirror active optics technology is one of the key technologies for the extremely large telescope, while edge sensor is one of the essential core components of active optics for the co-phasing maintenance of all segmented mirrors. With the increasing diameter of the telescope, the number of edge sensors increases geometrically. In addition, the imported products are expensive and subject to the import control of high-tech products. Therefore, it is urgently required to develop and master the key core technologies of edge sensors. This.project proposes a new type of high precision induction frequency output edge sensor, Aiming at the open and closed configurations, the influence rules and act ion mechanism of the structural parameters and the excitation power supply on the output characteristics of the sensor are studied. The internal relation between thermal drift and deformation behaviour of sensor structure and system thermal, error are analyzed and modeled. The multi-sensor data fusion models are established by. using machine learning and data mining technologies. The.experimental platform is used to verify the proposed displacement sensors and validate the error compensation and system stability. The research results of this project will be the key core technology for Chinese future construction of large optical/infrared telescope, they also will provide a solution for the high precision displacement sensors and applications in many high-precision measurement areas such as civil, military and aerospace.

拼接镜面主动光学技术是大型天文望远镜关键核心技术，边缘位移传感器是其实现大规模拼接子镜共相维持的核心组件。随着望远镜口径不断增大，边缘位移传感器的数量以几何级数增加。国外该产品价格昂贵，且对我国出口限制，迫切需要自主发展和掌握边缘位移传感器核心技术。本项目提出一种新型高精度感应频率输出式边缘位移传感器，通过开放式(多线圈差动结构)和封闭式(旁向测头)两种创新的设计方案，解决和完善复合影响因素的高灵敏度和稳定性补偿模型，将获得媲美国际先进边缘传感器的性能指标，并借助拼接镜面共相维持实验系统，模拟野外、南京和空间极端观测环境，开展边缘位移传感器的拼接维持实验，对所提出的差动调频式电感传感器性能指标、误差补偿方法及模型进行实验验证和应用测试。该项目的研究将为中国建设极大口径光学/红外望远镜储备关键核心技术，并为我国民用、军用及航天等高精度测量领域高精度位移传感器技术国家重大需求提供支持。

天文学是一门基于观测设备的观测科学，其发展对于更大口径、更高分辨率、更高集光本领的大型/极大望远镜的追求从来没有停歇。边缘位移传感器是大型/极大望远镜的关键技术——主动光学技术的核心测量反馈器件，决定了大型望远镜的主动光学的光学成像性能。在项目执行期间，经过多家参与单位和协同单位的积极合作支持，项目圆满完成了各项研究任务。针对极大望远镜拼接镜面共相维持实验对边缘传感器的高精度、高稳定性的技术要求，研究了传感器的结构热变形漂移行为，及其对系统误差的影响，设计了两种结构形式的差动调频式电感传感器，提出了一种采用多级（温度）误差补偿方法，通过仿真与实验相结合，研制了新型高精度频率输出式边缘位移传感器；（提出了基于LDC（电感数字转换模块）的频率输出式边缘位移传感器，完成了传感器小型化，物联网化设计；研制了2种频率输出式电感位移传感器。参加人数13人，发表论文9篇，特邀报告1个，授权（申请）发明专利3项，培养了2名博士研究生和2名硕士研究生，所研发的传感器系统，性能接近国际先进水平，财务预算执行情况达82.74%。