微纳米谐振器的能量耗散机理与降低能量耗散的途径

Energy dissipation in micro-and nano electromechanical resonators is an important issue in MEMS (micro-electromechanical system) and NEMS (nano-electromechanical system) design and development. In this project, systematic and in-depth studies will be conducted on the energy dissipation mechanisms and possible means to reduce energy dissipation in micro-/nano resonators by employing the approach of combining the microscopic models with macroscopic continuum theory. The main contents of research include: (1) numerical simulation and experimental verification of reducing the support loss by employing phononic crystal structures in the substrate, (2) theoretical model and governing law of thermoelastic damping on micrometer and sub-micrometer scales, (3) analysis of surface loss by utilizing microcopic-macrocopic linage method, (4) characteristics and analysis methods of energy dissipation of micro-nano resonators operating in nonlinear and parametrically driven regimes. The study is aimed at comprehensive analysis of relevant factors involved in the energy dissipation in MEMS and NEMS resonators and establishment of more precise quantitative models. The project is of great significance for in-depth understanding of energy dissipation mechanisms and bringing new insights on approaches of reducing energy dissipation in micro-/nano resonators. Successful implementation of this project will provide theoretical foundations and guidelines for design and improvement of MEMS and NEMS resonators.

微纳米谐振器的能量耗散是影响器件性能的一个重要问题，本项目拟采用微观模型和宏观连续介质理论相结合的方法对微纳米谐振器的能量耗散机理和降低能量耗散的可能途径进行深入、系统的研究，主要研究内容包括：1.采用声子晶体结构降低支撑损失的数值模拟和实验验证；2.微米、亚微米和纳米尺度微谐振器热弹性能量耗散的规律和计算模型；3.采用宏微观相关联的手段研究表面效应对微纳米谐振器能量损失的影响；4.微谐振器处于非线性工作状态和参数激励下热弹性阻尼的特点和分析方法。此研究将对各种影响能量耗散的因素做更全面、系统的分析，建立更精细的定量分析模型，对深刻揭示微纳米谐振器的能量耗散机制以及寻求有效降低能量耗散的途径有重要意义，可为微纳米谐振器的设计和性能的提高提供理论依据和参考。

微纳米谐振器的能量耗散是影响器件性能的一个重要问题，是微纳米力学的一个基本问题，本项目对微谐振器的能量耗散机理和降低能量耗散的可能途径进行了深入、系统的研究，主要研究内容包括：(1)基于广义热弹性理论微纳米谐振器的热弹性能量耗散分析；(2)基于微谐振器的质量传感器的热弹性能量耗散分析；(3)微谐振器和质量传感器中的预应力对热弹性能量耗散的影响；(4)支撑损失的理论模型及数值验证；(5)由于Casimir力引起的能量耗散；(6)采用声子晶体结构降低微谐振器支撑损失的理论模型和数值验证。提出了分析基于微谐振器的质量传感器的热弹性能量耗散的二维模型；给出了支撑损失的显式表达式，并发现在支撑损失的分析中正应力和剪应力的耦合项起着不可忽略的作用；发现Casimir力也可以引起微纳米谐振器的能量耗散，并导出了解析表达式，相关研究成果已在国际学术期刊发表。