基于高量值复现性与精确多参量模型的圆柱度量值溯源方法

To solve the problem of the low reproducibility of measuring system of cylindricity measuring instrument, and eliminate the attitude adjustment error of the instrument during the process of cylindricity value traceability, the following researches will be carried out: 1)A new dynamic calibration method for measuring system of instrument is proposed, the basic principle of the method is based on standard elliptic contour, and taking the radius difference of the major axis to the minor axis of the ellipse contour as the standard value.At the same time, a low-pass filter for data processing is used to achieve the high reproducibility for the calibration of instrument measuring system. 2) A decoupling method for the position adjustment of four degrees of freedom is developed,which is based on the coplanar orthogonal and spherical-oriented principle.This method will take full advantage of the minimum coupling effect of rotating component (θx-θy) with the translational component (x-y),and it is in the cross-section at the center of the sphere surface to establish the characteristics of the decoupling model,and the decoupling mechanism will be researched. Moreover, a new method concerning eliminating the residual errors and the offset errors on the basis of multi-bias parameters to get exact solutions of the parameters will be derived. 3) The major technological inspection: the calibration error for the cylindricity is less than 20nm/100mm, the errors are caused mainly by the measuring system calibration and the position adjustment offset. The research of the project can provide a theoretical basis and technical support for improving the cylindricity traceability precision, and lay the foundation for the establishment of new national or international standards and calibration specifications.

针对圆柱度量值溯源中存在的仪器测量系统标定误差大、复现性差的问题，以及仪器四自由度姿态调整误差难以消除的问题，开展如下研究：1)提出一种基于椭圆轮廓标准量的仪器测量系统动态标定方法，以椭圆轮廓长轴与短轴的半径差作为标准量，融合形状测量低通滤波机理，实现仪器测量系统的高复现性标定；2)提出一种基于共面正交及球面导向的四自由度姿态调整解耦方法，充分利用在球心截面处转动分量(θx-θy)与平移分量(x-y)耦合效应最小的特性建立解耦模型，研究解耦机理；在此基础上，建立包含被测圆柱度标准器倾斜分量与偏置分量的圆柱轮廓精确测量模型，并提出基于多参量精确求解的姿态调整误差与偏置误差的消除方法；3)主要指标：由仪器测量系统标定与姿态调整引起的圆柱度校准误差小于20nm/100mm。该项目的完成,可为提升圆柱度量值溯源精度提供理论依据与技术支撑,为建立新的国家标准与校准规范以及新的国际标准奠定基础。

超精密回转基准是超精密装备与仪器的核心基础单元，对其核心零件的圆柱度测量与校准是控制回转类零件质量的重要手段。针对圆柱度量值溯源中存在的仪器测量系统标定误差大、复现性差的问题，以及仪器四自由度姿态调整误差难以消除的问题，本项目开展了以下研究工作：. 1）提出了一种具有高量值复现性的仪器测量系统量值溯源方法。该方法以椭圆轮廓的长轴与短轴的半径差作为标准量，并融合形状测量低通滤波机理，对仪器的测量系统进行标定；并依据椭圆轮廓的低次谐波特性，利用低通形状滤波器充分滤除表面粗糙度、波纹度等中、高频信息，获得“纯净”的椭圆轮廓特征。该方法对仪器测量系统的标定状态与仪器正常测量状态完全一致，实验结果表明：在50UPR滤波条件下，椭圆块的圆度值为6.80μm，10次测量的重复性为0.01μm，与传统方法相比显著提高了仪器测量系统标定量值的复现性。. 2）提出了一种基于共面正交与球面导向的仪器四自由度姿态调整解耦方法。该方法以仪器四自由度调整之间功能相互独立为原则，平移分量的位置调整呈共面正交方式布置，转动分量的调整基于球形面导向原理，并充分利用球心截面位置平移分量与转动分量之间耦合效应最小、以及球面各点变形状态一致的特性，从原理上消除了转动分量与平移分量之间的耦合效应，实验结果表明：采用该方法工作台的调心精度可达到0.2μm，调倾精度为0.8″，调整效率比现有方法提高1倍。. 3）提出了包含轴线倾斜调整误差及偏置误差在内的多参量圆柱轮廓精确测量模型，对模型参量采用直接求解的方法，避免了传统方法中由于模型简化而产生较大截断误差的问题，实现了对各误差参量的精确识别和分离，最大限度地获取真实的圆柱轮廓特征。. 本项目的研究成果对提升圆柱度量值溯源水平奠定了良好的理论基础，该成果可推广应用于其它超精密装备及三维形位误差测量仪的研制。