新型微型硅曲面壳形陀螺谐振结构的基础理论研究

The objective of this research is to develop a novel silicon micrometer axial symmetrical curved surface shell gyroscopic resonator structure. The principle of this gyroscopic structure is based on the phase difference detection mechanism, which can be used for angle and angular velocity measurement. The gyroscope will be capable of switching automatically between a wide dynamic measurement range and a small dynamic measurement range. The precision of this gyroscope is 1 to 3 order of magnitude higher than current MEMS gyroscopes, which can be used to meet the stringent requirement for future navigation applications such as personal and vehicle navigation or auto-piloting..The proposed project will carry out research works on the theoretical modeling and design methodology of the silicon micrometer axial symmetrical curved surface shell gyroscopic resonator structure. The research will include theory of energy dissipation on the micro/nano-scale, the micro/nano-scale effect of the quality factor and the scientific methodology for theoretical modeling of high-order resonant mode and its structural optimization. Meanwhile, the 3-D micro-fabrication and the wafer level laser calibration techniques for the silicon micrometer axial symmetrical curved surface shell gyroscopic resonator structure will be studied. More specifically, a unique technology to fabricate curved surface electrode based on the self-alignment technique will be developed. Furthermore, the detection, calibration, compensation and error source analysis for the proposed silicon micrometer axial symmetrical curved surface shell gyroscopic will also be investigated. The final objective of this research is to build up a fundamental theory and fabrication procedure for silicon micrometer axial symmetrical curved surface shell gyroscope and form a firm foundation for the research and development of the next generation high precision, low cost silicon micro gyroscope.

本项目旨在寻求发展一种新型轴对称微型硅旋转曲面陀螺谐振结构，这种陀螺结构基于相位差检测原理，可用于空间的角度和角速度测量。并能够在较宽的量程范围内，进行高、低量程自动切换，能使目前微机电陀螺的精度水平提高1-3个数量级。满足未来个人导航、车载导航以及小型无人机导航等的高端应用需求。.本项目将研究微型硅旋转曲面壳形陀螺结构的理论模型和设计方法，研究内容包括微纳尺度能量耗散理论、品质因数微纳尺度效应，多阶谐振模态理论模型的构建及其结构优化设计的科学方法；研究微型硅旋转曲面壳形谐振结构的三维加工工艺模型以及晶圆级轴对称第一谐振模态方法；特别是研发一种独创的利用自对准工艺制作曲面电极的理论模型和科学方法。此外，还将开展基于相位差检测原理的微型硅曲面壳形谐振微机电陀螺的检测方法和误差源分析研究以及自校准和自补偿技术研究等。为新一代采用微细加工技术的高精度、低成本微型硅陀螺研制打下坚实的理论基础。

本项目成功地完成了硅基中心轴对称3D谐振子结构设计及其制备工艺流诚，突破了高品质因数多晶硅谐振器结构设计、高对称性多晶硅半球谐振器3D加工工艺、曲面立体电极自对准成型等关键技术, 研制了硅基微半球和硅基高对称蜘蛛网式嵌套环式谐振陀螺等二种陀螺样件, 完成了协议规定的全部研究内容，考核指标也全部达到协议要求。本项目在高对称性硅微半球谐振器制作工艺和轴对称嵌套环式谐振陀螺的结构设计和制备研究方面取得了一系列的具有原创性的研究工作和成果，申报了9项专利。在重大国际会议和国际重要期刊发表了论文26篇。此外，本项目的合作伙伴―华东光电集成器件研究所也在合作研究中获益不少。他们开发3D曲面结构的特殊工艺过程中解决了一系列的工艺难题，掌握了硅背面机械减薄及3D各向湿法刻蚀工艺、梯度掩膜、渐变刻蚀以及多种晶圆键合方法等多项关键技术，这些技术已经应用到所的其它MEMS传感器产品中，提高了成品率，降低了成本，取得了较大的经济效益。本项目所研发高对称性硅微半球谐振器和轴对称嵌套环式谐振陀螺样品的部分技术指标（比如半球圆度值优于4‰和正多边形嵌套环陀螺的相对频差值30ppm）为同类研究报道中最好的数据。本项研究为今后进一步开发高精度、大量程硅基微谐振陀螺产品打下了坚实好的基础，预期后续研究中将会形成全新的产品，并将在部分工业和军事领域中得到广泛的应用。